# US 11,897,758 B2 · Electrical contacting and method for producing an electrical contacting > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,897,758 B2 - Document ID: US11897758B2 - Status: Granted - Kind: B2 - Application number: 17/252,044 - Filed: 2019-06-25 - Published: 2021-08-26 - Granted: 2024-02-13 - Earliest claimed: 2018-06-30 - Assignees: Robert Bosch GmbH - Applicants: Robert Bosch GmbH - Inventors: Jochen Reinmuth; Markus Kuhnke; Stefan Majoni; Timo Schary - Web page: https://patentgrep.com/patent/US11897758B2 ## CPC - B81B 7/007: {Interconnections between the MEMS and external electrical signals} - B81C 1/00301: {Connecting electric signal lines from the MEMS device with external electrical signal lines, e.g. through vias} - B81B 2207/092: Buried interconnects in the substrate or in the lid - B81B 2207/095: through the lid - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01) ## Abstract An electrical contacting between a surrounding wiring and a conductor region. The conductor region is situated in a conductor layer above an SOI wafer or SOI chip. A cover layer is situated above the conductor layer and below the surrounding wiring. The cover layer has a contacting region. The contacting region is insulated from the rest of the cover layer by a first configuration of recesses. An opening is formed at least in the contacting region. A metallic material is situated in the opening. The metallic material connects the surrounding wiring and the conductor region. ## Claims ### Claim 1 An electrical contacting between a surrounding wiring and a conductor region, the conductor region being situated in a conductor layer above an SOI wafer or SOI chip, a cover layer being situated above the conductor layer and below the surrounding wiring, the cover layer having a contacting region, the contacting region being insulated from the rest of the cover layer by a first configuration of recesses, an opening is formed at least in the contacting region, a metallic material is situated in the opening, and the metallic material connects the surrounding wiring and the conductor region, wherein the conductor region is separated from a further conductor region by a second configuration of recesses, wherein the conductor region is insulated from the further conductor region by the second configuration of recesses. ### Claim 2 (depends on 1) The electrical contacting as recited in claim 1, wherein the opening is also fashioned in the conductor region, and the metallic material is further situated in the opening in the conductor region. ### Claim 3 (depends on 1) The electrical contacting as recited in claim 1, wherein a first insulator is situated in the first configuration of recesses. ### Claim 4 (depends on 1) The electrical contacting as recited in claim 1, wherein a direct contact is formed, in a first contact region between the conductor layer and the cover layer, the first contact region surrounds the opening at least partly. ### Claim 5 (depends on 1) The electrical contacting as recited in claim 1, wherein a direct contact is formed, in a first contact region between the conductor layer and the cover layer, the first contact region surrounds the opening completely. ### Claim 6 (depends on 1) The electrical contacting as recited in claim 1, wherein the contacting region surrounds the opening around its entire circumference. ### Claim 7 (depends on 1) The electrical contacting as recited in claim 1, wherein the metallic material is situated on a lateral wall of the opening in the conductor region, the metallic material being situated on a further lateral wall of the opening in the contacting region. ### Claim 8 (depends on 1) The electrical contacting as recited in claim 1, wherein the opening is further formed in an additional region of a silicon layer of the SOI wafer or SOI chip, the metallic material further being situated in the opening in the additional region. ### Claim 9 A method for producing an electrical contacting between a surrounding wiring and a conductor region, the conductor region being situated in a conductor layer above an SOI wafer or SOI chip, a cover layer being situated above the conductor layer and below the surrounding wiring, the method comprising: in a first step, structuring the cover layer in such a way that a contacting region is formed that is insulated from the rest of the cover layer by a first configuration of recesses; in a second step, forming an opening at least in the contacting region; and in a third step, situating a metallic material in the opening, the metallic material connecting the surrounding wiring and the conductor region, wherein the conductor region is separated from a further conductor region by a second configuration of recesses, wherein the conductor region is insulated from the further conductor region by the second configuration of recesses. ### Claim 10 (depends on 9) The method as recited in claim 9, wherein the opening is further formed in the conductor region in the second step, the metallic material further being situated in the opening in the conductor region in the third step. ### Claim 11 (depends on 9) The method as recited in claim 9, wherein the cover layer is formed in a first contact region in the first step, a direct contact being formed in the first contact region between the conductor layer and the cover layer, the cover layer further being situated on a second insulating layer. ### Claim 12 (depends on 11) The method as recited in claim 11, wherein a first insulator is situated in the first configuration of recesses in a first intermediate step, after the first step and before the second step, and wherein a first insulating layer is situated on the cover layer, and the first insulating layer being removed in a second intermediate step after the first intermediate step and before the second step, in a third contact region at the contacting region. ### Claim 13 (depends on 9) The method as recited in claim 9, wherein the surrounding wiring is a metallic surrounding wiring, and is situated on the first insulating layer in the third step. ### Claim 14 (depends on 9) The method as recited in claim 9, wherein: in a first pre-step, a structure is formed in a silicon layer of an SOI wafer or SOI chip; in a second pre-step, after the first pre-step, a third insulator is situated at least partly in the structure, and a third insulating layer is situated above the silicon layer; in a third pre-step, after the second pre-step, the third insulating layer is removed in a second contact region; in a fourth pre-step, after the third pre-step, the conductor layer is situated on the third insulating layer, and in the second contact region, a direct contact is formed between the conductor layer and the silicon layer, the conductor layer being structured in such a way that the conductor region is formed, which is insulated from the further conductor region of the conductor layer by the second configuration of recesses; in a fifth pre-step, after the fourth pre-step, a second insulating layer is situated on the conductor layer, a second insulator being situated in the second configuration of recesses; and in a sixth pre-step, after the fifth pre-step and before the first step, the second insulating layer is removed in a first contact region at the conductor region. ### Claim 15 A system, comprising: an electrical contacting between a surrounding wiring and a conductor region, the conductor region being situated in a conductor layer above an SOI wafer or SOI chip, a cover layer being situated above the conductor layer and below the surrounding wiring, the cover layer having a contacting region, the contacting region being insulated from the rest of the cover layer by a first configuration of recesses, an opening is formed at least in the contacting region, a metallic material is situated in the opening, and the metallic material connects the surrounding wiring and the conductor region; wherein the electrical contacting is configured for contacting a sensor, wherein the conductor region is separated from a further conductor region by a second configuration of recesses, wherein the conductor region is insulated from the further conductor region by the second configuration of recesses.