# US 11,896,929 B2 · Laser device and dehumidification management method for laser device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,896,929 B2 - Document ID: US11896929B2 - Status: Granted - Kind: B2 - Application number: 17/103,021 - Filed: 2020-11-24 - Published: 2021-03-18 - Granted: 2024-02-13 - Earliest claimed: 2018-06-29 - Assignees: Panasonic Intellectual Property Management Co., Ltd. - Applicants: Panasonic Intellectual Property Management Co., Ltd. - Inventors: Makoto Ryudo; Masatoshi Nishio; Jingbo Wang - Web page: https://patentgrep.com/patent/US11896929B2 ## CPC - B01D 53/0454: {Controlling adsorption (controlling temperature swing adsorption B01D53/0462, controlling pressure swing adsorption B01D53/047)} - H01S 5/0222: Gas-filled housings - B01D 53/261: {by adsorption} - H01S 5/02407: {Active cooling, e.g. the laser temperature is controlled by a thermo-electric cooler or water cooling} - H01S 5/068: Stabilisation of laser output parameters (H01S5/0625 takes precedence) - H01S 5/06804: {by monitoring an external parameter, e.g. temperature} - B01D 2257/80: Water - B01D 2259/45: Gas separation or purification devices adapted for specific applications - H01S 5/02251: using optical fibres - H01S 5/024: Arrangements for thermal management - H01S 5/02423: {Liquid cooling, e.g. a liquid cools a mount of the laser} - H01S 5/4012: {Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms} - H01S 5/4087: {emitting more than one wavelength} - B01D: SEPARATION (separating solids from solids by wet methods B03B, B03D; by pneumatic jigs or tables B03B; by other dry methods B07; magnetic or electrostatic separation of solid materials from solid materials or fluids, separation by high-voltage electric fields B03C; centrifuges, vortex apparatus B04; presses per se for squeezing-out liquid from liquid-containing material B30B9/02; treatment of water C02F, e.g. softening by ion-exchange C02F1/42; {arrangements of air intake cleaners in gas turbine plants F02C7/05} ; arrangements or mounting of filters in air-conditioning, air-humidification or ventilation F24F13/28) - H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL ## Abstract A laser device includes a laser oscillator, a dehumidifier, and a controller controlling an operation of the dehumidifier. The controller controls the dehumidifier such that the dew point inside the laser oscillator is lower than the first dew point when a monolayer or less of water molecules is adsorbed, or such that the dew point is equal to or higher than the second dew point when more than a monolayer of water molecules is adsorbed inside the laser oscillator, and is lower than the third dew point at which the dew condensation starts to occur inside the laser oscillator. ## Claims ### Claim 1 A laser device comprising: a laser oscillator; a dehumidifier for dehumidifying inside of the laser oscillator; and a controller controlling an operation of the dehumidifier, wherein the controller is configured to control the dehumidifier such that a dew point inside the laser oscillator meets a condition one and a condition two, wherein the condition one is when the dew point inside the laser oscillator is lower than a first dew point at which a monolayer or less of water molecules is adsorbed, and wherein the condition two is when the dew point inside the laser oscillator is equal to or higher than a second dew point at which more than a monolayer of water molecules is adsorbed inside the laser oscillator and lower than a third dew point at which dew condensation starts to occur inside the laser oscillator, wherein the first dew point is a value corresponding to an upper limit value of water vapor pressure in a state in which a monolayer or less of water molecules is adsorbed inside the laser oscillator, wherein the second dew point is a value corresponding to or higher than a lower limit value of water vapor pressure in a state in which more than a monolayer of water molecules is adsorbed inside the laser oscillator, and wherein the third dew point is a value corresponding to an upper limit value of water vapor pressure in a state in which more than a monolayer of water molecules is adsorbed inside the laser oscillator and being higher than the second dew point. ### Claim 2 (depends on 1) The laser device of claim 1, wherein the dehumidifier includes a desiccator including an adsorbent, and an air pump connected to the desiccator; and the dehumidifier dehumidifies the inside of the laser oscillator by circulating air between the inside of the laser oscillator and the air pump via the desiccator and a pipe that connects the desiccator, the air pump, and the laser oscillator. ### Claim 3 (depends on 1) The laser device of claim 1, wherein the controller warns an operator if the dehumidifier is operated and the dew point does not decrease after a lapse of a predetermined time. ### Claim 4 (depends on 1) The laser device of claim 1, wherein the laser oscillator is configured to be capable of emitting a laser beam to outside when a dew point inside the laser oscillator is lower than the first dew point, or the dew point inside the laser oscillator is equal to or higher than the second dew point and lower than the third dew point. ### Claim 5 A dehumidification management method for a laser device including a laser oscillator, a dehumidifier for dehumidifying the inside of the laser oscillator, and a controller, wherein the controller is configured to control the dehumidifier such that a dew point inside the laser oscillator meets a condition one and a condition two, wherein the condition one is when the dew point inside the laser oscillator is lower than a first dew point at which a monolayer or less of water molecules is adsorbed, and wherein the condition two is when the dew point inside the laser oscillator is equal to or higher than a second dew point at which more than a monolayer of water molecules is adsorbed inside the laser oscillator and lower than a third dew point at which dew condensation starts to occur inside the laser oscillator, wherein the first dew point is a value corresponding to an upper limit value of water vapor pressure in a state in which a monolayer or less of water molecules is adsorbed inside the laser oscillator, wherein the second dew point is a value corresponding to or higher than a lower limit value of water vapor pressure in a state in which more than a monolayer of water molecules is adsorbed inside the laser oscillator, and wherein the third dew point is a value corresponding to an upper limit value of water vapor pressure in a state in which more than a monolayer of water molecules is adsorbed inside the laser oscillator and being higher than the second dew point. ### Claim 6 (depends on 5) The method of claim 5, further comprising: dehumidifying the inside of the laser oscillator by operating the dehumidifier; measuring the dew point inside the laser oscillator; continuing with dehumidification of the inside of the laser oscillator if, after determining whether the dew point is equal to or higher than the first dew point and equal to or lower than the second dew point, a determination result is positive; and stopping an operation of the dehumidifier if the dew point is lower than a fourth dew point that is lower than the first dew point. ### Claim 7 (depends on 5) The method of claim 5, further comprising: dehumidifying the inside of the laser oscillator by operating the dehumidifier; measuring the dew point inside the laser oscillator; continuing with dehumidification of the inside of the laser oscillator if, after determining whether the dew point is equal to or higher than the second dew point and lower than the third dew point, a determination result is positive; and stopping the operation of the dehumidifier if the dew point is lower than the second dew point. ### Claim 8 (depends on 5) The method of claim 5, wherein a warning is sent to an operator if the dehumidifier is operated and the dew point does not decrease after a lapse of a predetermined time. ### Claim 9 A laser device comprising: a laser oscillator; a dehumidifier for dehumidifying inside of the laser oscillator; and a controller controlling an operation of the dehumidifier, wherein the controller is configured to control the dehumidifier such that water vapor pressure inside the laser oscillator meets a condition one and a condition two, wherein the condition one is when water vapor pressure inside the laser oscillator is lower than a first water vapor pressure at which a monolayer or less of water molecules is adsorbed, and wherein the condition two is when water vapor pressure inside the laser oscillator is equal to or higher than a second water vapor pressure at which more than a monolayer of water molecules is adsorbed inside the laser oscillator and lower than a third water vapor pressure at which dew condensation starts to occur inside the laser oscillator. ### Claim 10 (depends on 9) The laser device of claim 9, wherein the dehumidifier includes a desiccator including an adsorbent, and an air pump connected to the desiccator; and the dehumidifier dehumidifies the inside of the laser oscillator by circulating air between the inside of the laser oscillator and the air pump via the desiccator and a pipe that connects the desiccator, the air pump, and the laser oscillator. ### Claim 11 (depends on 9) The laser device of claim 9, wherein the controller warns an operator if the dehumidifier is operated and the water vapor pressure does not decrease after a lapse of a predetermined time. ### Claim 12 (depends on 9) The laser device of claim 9, wherein the laser oscillator is configured to be capable of emitting a laser beam to outside when water vapor pressure inside the laser oscillator is lower than the first water vapor pressure, or the water vapor pressure inside the laser oscillator is equal to or higher than the second water vapor pressure and lower than the third water vapor pressure. ### Claim 13 A dehumidification management method for a laser device including a laser oscillator, a dehumidifier for dehumidifying the inside of the laser oscillator, and a controller, wherein the controller is configured to control the dehumidifier such that such that a water vapor pressure inside the laser oscillator meets a condition one and a condition two, wherein the condition one is when water vapor pressure inside the laser oscillator is lower than a first water vapor pressure at which a monolayer or less of water molecules is adsorbed, and wherein the condition two is when water vapor pressure inside the laser oscillator is equal to or higher than a second water vapor pressure at which more than a monolayer of water molecules is adsorbed inside the laser oscillator and lower than a third water vapor pressure at which dew condensation starts to occur inside the laser oscillator. ### Claim 14 (depends on 13) The method of claim 13, further comprising: dehumidifying the inside of the laser oscillator by operating the dehumidifier; measuring atmosphere inside the laser oscillator by a humidity sensor; continuing with dehumidification of the inside of the laser oscillator if, after determining whether the water vapor pressure is equal to or higher than the first water vapor pressure and equal to or lower than the second water vapor pressure, a determination result is positive; and stopping an operation of the dehumidifier if the water vapor pressure is lower than a fourth water vapor pressure that is lower than the first water vapor pressure. ### Claim 15 (depends on 13) The method of claim 13, further comprising: dehumidifying the inside of the laser oscillator by operating the dehumidifier; measuring the atmosphere inside the laser oscillator by the humidity sensor; continuing with dehumidification of the inside of the laser oscillator if, after determining whether the water vapor pressure is equal to or higher than the second water vapor pressure and lower than the third water vapor pressure, a determination result is positive; and stopping the operation of the dehumidifier if the water vapor pressure is lower than the second water vapor pressure. ### Claim 16 (depends on 13) The method of claim 13, wherein a warning is sent to an operator if the dehumidifier is operated and the water vapor pressure does not decrease after a lapse of a predetermined time.