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US 11,895,932 B2Granted
Selective chemical frequency modification of Josephson junction resonators
AssigneeInternational Business Machines Corporation
InventorsEric Peter Lewandowski, Jeng-Bang Yau, Eric Zhang, Bucknell C Webb
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Abstract
Techniques regarding selectively tuning the operating frequency of superconducting Josephson junction resonators are provided. For example, one or more embodiments described herein can comprise a method that can include chemically altering a Josephson junction of a Josephson junction resonator via a plasma treatment. The method can also comprise selectively tuning an operating frequency of the Josephson junction resonator based on a property of the plasma treatment.
Claims17
A method, comprising:
- selecting a target Josephson junction resonator of a plurality of Josephson junction resonators on a substrate;
- chemically altering a Josephson junction of the target Josephson junction resonator via a plasma treatment, without chemically altering a second Josephson junction of the plurality of Josephson junction resonators via the plasma treatment;
- and
- selectively tuning an operating frequency of the target Josephson junction resonator based on a property of the plasma treatment.
1 more element
A method, comprising:
- depositing a mask layer onto a Josephson junction resonator, wherein the mask layer comprises a hole that correlates to a position of a Josephson junction of the Josephson junction resonator;
- altering the Josephson junction of the Josephson junction resonator via a plasma treatment;
- and
- selectively tuning an operating frequency of the Josephson junction based on a property of the plasma treatment, wherein the mask layer protects a second Josephson junction from the plasma treatment.
1 more element
A method, comprising:
- exposing a Josephson junction of a Josephson junction resonator to a plasma treatment, wherein the plasma treatment tunes an operating frequency of the Josephson junction resonator to a target operating frequency by altering an electrical resistance of the Josephson junction;
- and
- shielding a second Josephson junction from the plasma treatment, wherein the second Josephson junction neighbors the Josephson junction of the Josephson junction resonator.
Dependencies are inferred from the claim text.