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US 11,895,903 B2Granted
Method of forming perovskite thin film and light-emitting device including layer manufactured thereby
AssigneeSamsung Display Co., Ltd.
InventorsYoonseok Ka, Dongchan Kim, Jiyoung Moon, Heechang Yoon
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Abstract
A method of forming a perovskite thin film and a light-emitting device including a layer manufactured by the method.
Claims18
A method of forming a perovskite thin film, the method comprising:
- preparing a substrate;
- spraying a first solution of a first perovskite compound precursor through an inner nozzle of a dual nozzle including the inner nozzle and an outer nozzle;
- spraying a second solution of a second perovskite compound precursor through the outer nozzle;
- forming a perovskite compound solution by reacting the first solution of the first perovskite compound precursor and the second solution of the second perovskite compound precursor;
- forming a membrane on the substrate from the perovskite compound solution;
- and
- evaporating a solvent of the perovskite compound solution from the membrane on the substrate.
4 more elements
Dependencies are inferred from the claim text.