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US 11,895,872 B2Granted
Thin film transistor with small storage capacitor with metal oxide switch
AssigneeApplied Materials, Inc.
InventorsJung Bae Kim, Dong Kil Yim, Soo Young Choi, Lai Zhao
Life of this patent
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Abstract
Disclosed herein is a sub-pixel circuit for a display device. The sub-pixel circuit has a driving TFT and at least one switching TFT. The at least one switching TFT is an oxide TFT. The sub-pixel circuit additionally has at least one storage capacitor wherein the storage capacitor has a capacitance between about 1 fF and about 55 fF.
Claims12
A sub-pixel circuit for a display, the sub-pixel circuit comprising:
- a driving thin film transistor (TFT), the driving TFT comprising:
- a first conductive channel in a gate insulating layer;
- a first gate disposed in a first inter layer dielectric layer above the gate insulating layer;
- a first source disposed in a buffer layer above the first inter layer dielectric layer and connected to the first conductive channel;
- and
- a first drain disposed in the buffer layer and connected to the first conductive channel;
- at least one switching TFT formed in a second inter layer dielectric layer above the buffer layer, wherein the at least one switching TFT is an oxide TFT;
- and
- at least one storage capacitor, the at least one storage capacitor comprising:
- a second conductive channel disposed in the gate insulating layer and isolated from the first conductive channel;
- a second gate disposed in the first inter layer dielectric layer and isolated from the first gate;
- and
- a via of the first source connected to the second conductive channel and the first source, wherein the at least one storage capacitor has a capacitance between about 1 fF and about 55 fF.
10 more elements
A sub-pixel circuit formed in a stack, the sub-pixel circuit comprising:
- a driving thin film transistor (TFT) comprising:
- a source disposed in a buffer layer in the stack;
- a drain disposed in the buffer layer in the stack;
- a first gate formed in a first inter layer dielectric layer below the buffer layer in the stack;
- and
- a conductive channel formed in a gate insulating layer below the first inter layer dielectric layer in the stack, the conductive channel having a first end and a second end, wherein the first end is electrically coupled to the source and the second end is electrically coupled to the drain;
- a switching TFT formed in a second inter layer dielectric layer above the buffer layer in the stack;
- and
- at least one storage capacitor, comprising:
- a second gate formed in the first inter layer dielectric layer;
- and
- the source of the driving TFT, the source extending away from the driving TFT in the buffer layer, and overlapping the second gate.
9 more elements
A display comprising:
- a plurality of pixels, the plurality of pixels comprising:
- a plurality of sub-pixels, each sub-pixel of the plurality of pixels comprising:
- an organic light emitting diode (OLED) area;
- and
- a sub-pixel circuit, the sub-pixel circuit comprising:
- a driving thin film transistor (TFT), the driving TFT comprising:
- a conductive channel in a gate insulating layer;
- a gate disposed in a first inter layer dielectric layer above the gate insulating layer;
- a source disposed in a buffer layer above the first inter layer dielectric layer and connected to conductive channel;
- and
- a drain disposed in the buffer layer connected to the conductive channel;
- at least one switching TFT formed in a second inter layer dielectric layer above the buffer layer, wherein the at least one switching TFT is an oxide TFT;
- and
- at least one storage capacitor, wherein the at least one storage capacitor is disposed within the driving TFT and comprises the source extending toward the drain and overlapping the gate.
11 more elements
Dependencies are inferred from the claim text.