Substrate processing method
AssigneeSumitomo Precision Products Co., Ltd.
InventorYasuyuki Hirata
Life of this patent
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Abstract
The method for processing a substrate includes the substrate preparation step of preparing the substrate, the pattern formation step of forming dummy patterns extending in an X-direction on the substrate, the mask arrangement step of arranging a stencil mask having multiple opening patterns on the substrate, the coating formation step of forming a metal film on the substrate through the multiple opening patterns, and the separation step of separating the dummy patterns from the substrate to obtain a submount. The dummy pattern has protrusion formed such that a side surface of the submount is exposed and formed close to the side surface with a clearance.
Claims8
A substrate processing method, the method comprising:
- a substrate preparation step of preparing a substrate having an upper surface and a lower surface;
- a first pattern formation step of forming a dummy pattern extending in a first direction on the substrate and having a protrusion;
- a second pattern formation step of forming a first groove and a second groove each extending in the first direction on the substrate;
- a mask arrangement step of arranging a stencil mask having multiple opening patterns on the substrate;
- a coating formation step of forming a coating on the substrate through the multiple opening patterns;
- and
- a separation step of separating the dummy pattern from the substrate to divide the substrate into pieces and obtain a divided part of the substrate as a body portion,
- wherein:
- in the second pattern formation step, the first groove and the second groove each penetrate the substrate in a third direction as a thickness direction of the substrate, and the first groove and the second groove are formed such that a surface to be a side surface of the body portion is exposed,
- after the first pattern formation step and before the separation step, the protrusion protrudes from a side surface of the dummy pattern and is formed with a predetermined clearance relative to the surface to be the side surface of the body portion, and
- viewed from the third direction, a part of the side surface of the dummy pattern other than the protrusion is positioned a distance away from the surface to be the side surface of the body portion that is greater than the predetermined clearance.
Dependencies are inferred from the claim text.