Hybrid plasma source and operation method thereof

A hybrid plasma source comprising:

• at least one microwave source for generating at least one microwave, the microwave source comprising a magnetron, a central metal rod and a cylindrical outer tube disposed coaxially, the central metal rod is located in the cylindrical outer tube;
• a reaction chamber, the reaction chamber comprising a first microwave resonant chamber, a second microwave resonant chamber and at least one pair of hollow metal tubes, two ends of each of the hollow metal tubes being respectively communicated to the first microwave resonant chamber and the second microwave resonant chamber, wherein one end of the central metal rod of the microwave source is connected to an output antenna of the magnetron, another end of the central metal rod of the microwave source extends into the reaction chamber, and the microwave generated by the magnetron is conducted into the reaction chamber through the central metal rod and the cylindrical outer tube, so as to excite a working gas in the reaction chamber into a plasma;
• and
• at least one ferrite transformer magnetic core, the ferrite transformer magnetic core comprising a ferrite magnetic core with two hollow areas respectively sleeved on the hollow metal tubes, an induction coil wound around the ferrite magnetic core through the two hollow areas, and a driving power source electrically connected to the induction coil, thereby generating an induced electric field in the hollow metal tubes of the reaction chamber, and the induced electric field exciting the plasma to form an electric current with a closed path in the reaction chamber to further dissociate the working gas to increase a density of the plasma.