Holding member, irradiator, and plasma apparatus
AssigneeSekisui Chemical Co., Ltd.
InventorsTatsuya Matsuo, Yoshishige Takikawa, Yu Nagahara, Naomichi Saito, Masaki Iwasaki, Takaya Oshita
Life of this patent
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Abstract
An irradiator includes: a first electrode to which a voltage is applied for generating a plasma; and a holding member holding the first electrode; wherein: the holding member has a first member and a second member that are in contact with each other to constitute an accommodation space accommodating the first electrode; and a contact surface between the first member and the second member includes a non-perpendicular contact surface that is non-perpendicular to an axis of the first electrode.
Claims11
An irradiator comprising:
- a first electrode to which a voltage is applied for generating a plasma;
- and
- a holding member holding the first electrode;
- wherein:
- the holding member has a first member and a second member that are in contact with each other to constitute an accommodation space accommodating the first electrode;
- a contact surface between the first member and the second member includes a non-perpendicular contact surface that is non-perpendicular to an axis of the first electrode;
- and
- the non-perpendicular contact surface includes a first non-perpendicular contact surface, and a second non-perpendicular contact surface that is apart from the first non-perpendicular contact surface in a radial direction perpendicular to the axis.
An irradiator comprising:
- a first electrode to which a voltage is applied for generating a plasma;
- and
- a holding member holding the first electrode;
- wherein:
- the holding member has a first member and a second member that are in contact with each other to constitute an accommodation space accommodating the first electrode;
- a contact surface between the first member and the second member includes a non-perpendicular contact surface that is non-perpendicular to an axis of the first electrode;
- the first electrode has a larger diameter part having a largest outward projection length in a radial direction perpendicular to the axis;
- and
- the non-perpendicular contact surface is located outside the larger diameter part in the radial direction.
Dependencies are inferred from the claim text.