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US 11,895,741 B2Granted
Multi-zone pedestal heater having a routing layer
AssigneeWatlow Electric Manufacturing Company
InventorsKevin Ptasienski, Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips, Ken Ames, Patrick Margavio, Kurt English
Life of this patent
Estimating the term…
Abstract
A support pedestal includes a support member including a resistive layer having a plurality of zones, a routing layer, and a plurality of conductive vias. The plurality of zones are defined by a plurality of independently controllable resistive heating elements. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of conductive vias.
Claims20
A support pedestal comprising:
- a support member including a resistive layer having a plurality of zones, a routing layer, and a plurality of conductive vias, wherein:
- the plurality of zones are defined by a plurality of independently controllable resistive heating elements, and
- the resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of conductive vias;
- and
- a plurality pairs of electric terminals, each pair of electric terminals connected to a corresponding one of the plurality of independently controllable resistive heating elements via the routing layer and a corresponding pair of the plurality of conductive vias.
2 more elements
A support pedestal comprising:
- a support member including a resistive layer having a plurality of zones, a routing layer, a main substrate having opposing surfaces, and a plurality of conductive vias, wherein:
- the plurality of zones are defined by a plurality of independently controllable resistive heating elements,
- the resistive layer and the routing layer being disposed on the opposing surfaces of the main substrate,
- the resistive layer and the routing layer are connected by the plurality of conductive vias, and
- the plurality of conductive vias extend through the main substrate;
- and
- a plurality pairs of electric terminals, each pair of electric terminals connected to a corresponding one of the plurality of independently controllable resistive heating elements via the routing layer and a corresponding pair of the plurality of conductive vias.
4 more elements
Dependencies are inferred from the claim text.