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US 11,894,833 B2Granted
Bulk acoustic wave resonator
AssigneeSamsung Electronics Co., Ltd.
InventorsJea Shik Shin, Duck Hwan Kim, Chul Soo Kim, Sang Uk Son, In Sang Song, Moon Chul Lee
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Abstract
Disclosed is a bulk acoustic wave resonator (BAWR). The BAWR includes a bulk acoustic wave resonance unit with a first electrode, a second electrode, and a piezoelectric layer. The piezoelectric layer is disposed between the first electrode and the second electrode. An air edge is formed at a distance from a center of the bulk acoustic wave resonance unit.
Claims8
A bulk acoustic wave resonator (BAWR), comprising:
- a bulk acoustic wave resonance unit comprising a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode;
- an air gap disposed below the bulk acoustic wave resonance unit;
- an air edge formed at a distance from a center of the bulk acoustic wave resonance unit;
- and
- a frame aligned over an outer portion of the first electrode in the bulk acoustic wave resonance unit.
2 more elements
Dependencies are inferred from the claim text.