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US 11,894,399 B2Granted
Compact hyperspectral spectrometers based on semiconductor nanomembranes
AssigneeWisconsin Alumni Research Foundation
InventorsZhenqiang Ma, Zhenyang Xia, Ming Zhou, Qiaoqiang Gan, Zongfu Yu
Life of this patent
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Abstract
Hyperspectral resonant cavity imaging spectrometers and imaging systems incorporating the resonant cavity spectrometers are provided. The spectrometers include an array of photodetectors based on photosensitive semiconductor nanomembranes disposed between two dielectric spacers, each of the dielectric spacers having a thickness gradient along a lateral direction, such that the resonant cavity height differs for different photodetectors in the array.
Claims19
A resonant cavity spectrometer comprising:
- a reflector;
- a first dielectric spacer disposed over the reflector, the first dielectric spacer having a thickness gradient along a lateral direction;
- a second dielectric spacer disposed above the first dielectric spacer, the second dielectric spacer having a thickness gradient along a lateral direction;
- and
- a pixel array comprising a plurality of photodetectors, the photodetectors comprising photosensitive semiconductor nanomembranes, disposed between the first dielectric spacer and the second dielectric spacer, wherein the reflector, the first dielectric spacer, and the second dielectric spacer define a resonant cavity having a cavity height gradient along at least one lateral direction.
2 more elements
Dependencies are inferred from the claim text.