Contact resistance monitoring device, manufacturing method thereof, and display panel
OwnerXiaohui Nieinventor
Life of this patent
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Abstract
A contact resistance monitoring device, a manufacturing method thereof, and a display panel are provided. The contact resistance monitoring device includes a substrate, a gate metal layer disposed on the substrate, an interlayer dielectric layer disposed on the substrate, a source and drain metal layers disposed in the recessed hole of the interlayer dielectric layer, and a pixel electrode layer disposed on the interlayer dielectric layer and the source and drain metal layer.
Claims18
A contact resistance monitoring device, which is applied to monitor a contact resistance between a source and drain metal layer and a pixel electrode layer in a display panel, and is disposed in a non-display area of the display panel, wherein the contact resistance monitoring device comprises:
- a substrate;
- a gate metal layer disposed on the substrate;
- an interlayer dielectric layer disposed on the substrate, wherein the interlayer dielectric layer is provided with a recessed hole, and the recessed hole exposes the gate metal layer;
- the source and drain metal layer disposed in the recessed hole and electrically connected to the gate metal layer;
- and
- the pixel electrode layer disposed on the interlayer dielectric layer and the source and drain metal layer, and electrically connected to the source and drain metal layer;
- wherein a width of the recessed hole is greater than a width of the gate metal layer, such that at least a part of a bottom of the recessed hole is a structure of the interlayer dielectric layer.
A display panel comprising a display area and a non-display area, wherein the non-display area is provided with a contact resistance monitoring device, wherein the contact resistance monitoring device comprises:
- a substrate;
- a gate metal layer disposed on the substrate;
- an interlayer dielectric layer disposed on the substrate, wherein the interlayer dielectric layer is provided with a recessed hole, and the recessed hole exposes the gate metal layer;
- the source and drain metal layer disposed in the recessed hole and electrically connected to the gate metal layer;
- and
- the pixel electrode layer disposed on the interlayer dielectric layer and the source and drain metal layer, and electrically connected to the source and drain metal layer;
- wherein the source and drain metal layer in the contact resistance monitoring device completely covers the recessed hole on the interlayer dielectric layer, and a thickness of the source and drain metal layer is equal to a height of the recessed hole.
A display panel comprising a display area and a non-display area, wherein the non-display area is provided with a contact resistance monitoring device, wherein the contact resistance monitoring device comprises:
- a substrate;
- a gate metal layer disposed on the substrate;
- an interlayer dielectric layer disposed on the substrate, wherein the interlayer dielectric layer is provided with a recessed hole, and the recessed hole exposes the gate metal layer;
- the source and drain metal layer disposed in the recessed hole and electrically connected to the gate metal layer;
- and
- the pixel electrode layer disposed on the interlayer dielectric layer and the source and drain metal layer, and electrically connected to the source and drain metal layer;
- wherein a width of the recessed hole is greater than a width of the gate metal layer, such that at least a part of a bottom of the recessed hole is a structure of the interlayer dielectric layer.
Dependencies are inferred from the claim text.