Manufacturing method of power semiconductor device, power semiconductor device, and power converter
AssigneeMitsubishi Electric Corporation
InventorKeisuke Kawamoto
Life of this patent
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Abstract
A power semiconductor element and a support member are stacked with an intermediate structure being interposed between the power semiconductor element and the support member. The intermediate structure includes a first metal paste layer and at least one first penetrating member. The first metal paste layer contains a plurality of first metal particles. The at least one first penetrating member penetrates the first metal paste layer. At least one first vibrator attached to the at least one first penetrating member penetrating the first metal paste layer is vibrated. The first metal paste layer is heated so that the plurality of first metal particles are sintered or fused.
Claims20
A power semiconductor device comprising:
- a support member;
- an intermediate structure provided on the support member, the intermediate structure comprising a joining layer and at least one penetrating member, the joining layer containing metal, the at least one penetrating member penetrating the joining layer;
- and
- a power semiconductor element provided on the intermediate structure, wherein
- the at least one penetrating member comprises a first end portion and a second end portion that project from the joining layer so as to extend outward from the joining layer.
A power semiconductor device comprising:
- a support member;
- an intermediate structure provided on the support member, the intermediate structure comprising a joining layer and at least one penetrating member, the joining layer containing metal, the at least one penetrating member penetrating the joining layer;
- and
- a power semiconductor element provided on the intermediate structure, wherein
- each penetrating member among the at least one penetrating member extends in a diagonal direction of the power semiconductor element in a plan view.
Dependencies are inferred from the claim text.