Methods of manufacturing a semiconductor device including a joint adjacent to a post
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChun-Lin Lu, Kai-Chiang Wu, Ming-Kai Liu, Yen-Ping Wang, Shih-Wei Liang, Ching-Feng Yang, Chia-Chun Miao, Hao-Yi Tsai
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Abstract
A method of manufacturing a semiconductor device includes providing a carrier, disposing a first pad on the carrier, forming a post on the first pad, and disposing a joint adjacent to the post and the first pad to form a first entire contact interface between the first pad and the joint and a second entire contact interface between the first pad and the post. The first entire contact interface and the second entire contact interface are flat surfaces.
Claims20
A method of manufacturing a semiconductor device, comprising:
- providing a first carrier including a first surface and a second surface opposite to the first surface;
- disposing a first pad on the first carrier;
- forming a post on the first pad;
- disposing a joint adjacent to the post and the first pad to form a first contact interface between the first pad and the joint and a second contact interface between the first pad and the post, wherein the first contact interface is entirely between the first pad and the joint, and the second contact interface is entirely between the first pad and the post;
- providing a second carrier facing the first surface of the first carrier, wherein the first contact interface and the second contact interface are entirely between the first surface and the second surface;
- disposing a second pad on the second carrier;
- mounting the first carrier on the second carrier;
- connecting the first pad and the second pad by the joint to form a third contact interface between the joint and the second pad, wherein the third contact interface is entirely between the joint and the second pad, and a top surface of the post is completely exposed through the joint prior to the connecting the first pad and the second pad;
- and
- heat-treating the joint.
A method of manufacturing a semiconductor device, comprising:
- providing a first carrier including a first surface and a second surface opposite to the first surface;
- disposing a first pad on the first carrier;
- forming a post on the first pad;
- disposing a joint adjacent to the post and the first pad to form a first contact interface between the first pad and the joint and a second contact interface between the first pad and the post, wherein the first contact interface is entirely between the first pad and the joint, and the second contact interface is entirely between the first pad and the post;
- providing a second carrier facing the first surface of the first carrier, wherein the first contact interface and the second contact interface are entirely between the first surface and the second surface;
- disposing a second pad on the second carrier;
- and
- connecting the first pad and the second pad by the joint to form a third contact interface between the joint and the second pad, wherein the third contact interface is entirely between the joint and the second pad, and a top surface of the post is at least partially completely exposed through the joint prior to the connecting the first pad and the second pad.
A method of manufacturing a semiconductor device, comprising:
- providing a first carrier comprising a first pad;
- forming a post on the first pad;
- disposing a joint adjacent to the post and the first pad to form a first contact interface between the first pad and the joint and a second contact interface between the first pad and the post, wherein the first contact interface is entirely between the first pad and the joint, and the second contact interface is entirely between the first pad and the post;
- providing a second carrier comprising a second pad facing the first carrier;
- and
- connecting the first pad and the second pad by the joint to form a third contact interface between the joint and the second pad, wherein the third contact interface is entirely between the joint and the second pad, and a top surface of the post is completely exposed through the joint prior to the connecting the first pad and the second pad.
Dependencies are inferred from the claim text.