Circuit wiring techniques for stacked transistor structures
AssigneeInternational Business Machines Corporation
InventorsDongbing Shao, Chen Zhang, Zheng Xu, Tenko Yamashita
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AssigneeInternational Business Machines Corporation
InventorsDongbing Shao, Chen Zhang, Zheng Xu, Tenko Yamashita
Estimating the term…
A semiconductor structure includes a three-dimensional stacked transistor structure including first and second field-effect transistors of a first type at a first vertical level and third and fourth field-effect transistors of a second type at a second vertical level disposed over the first vertical level. The semiconductor structure also includes a first gate structure shared between the first and second field-effect transistors at the first vertical level, a second gate structure shared between the third and fourth field-effect transistors at the second vertical level, and a gate contact shared by the first and second gate structures. The wherein the first and second gate structures are vertically aligned with another in a layout of the three-dimensional stacked transistor structure between source drain/regions of the first, second, third and fourth field-effect transistors.
A method of forming a semiconductor structure comprising:
Dependencies are inferred from the claim text.