Bonding apparatus and bonding method
AssigneeTokyo Electron Limited
InventorsNorio Wada, Shintaro Sugihara
Life of this patent
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Abstract
A bonding apparatus includes a first holder, a second holder, an attracting pressure generator and a lift pin. The first holder is configured to hold a first substrate. The second holder, disposed at a position facing the first holder, has an attraction surface configured to attract a second substrate to be bonded to the first substrate. The attracting pressure generator is configured to generate an attracting pressure in the attraction surface. The lift pin is configured to space the second substrate on the attraction surface apart from the second holder. The second holder is provided with a space including an opening through which the lift pin passes, and the space is controlled to have a pressure lower than an atmospheric pressure.
Claims8
A bonding apparatus, comprising:
- a first holder configured to hold a first substrate;
- a second holder, disposed at a position facing the first holder, having an attraction surface configured to attract a second substrate to be bonded to the first substrate;
- an attracting pressure generator configured to generate an attracting pressure in the attraction surface;
- and
- a lift pin configured to space the second substrate on the attraction surface apart from the second holder,
- wherein the second holder is provided with a space including an opening through which the lift pin passes, and
- the space is controlled to have a pressure lower than an atmospheric pressure,
- wherein the second holder comprises:
- a housing forming the space;
- a driving unit configured to drive the lift pin;
- and
- a sealing member, disposed between the housing and the driving unit, configured to close a gap between the housing and the lift pin when the first substrate and the second substrate are bonded,
- wherein the sealing member is an O-ring seal.
A bonding apparatus, comprising:
- a first holder configured to hold a first substrate;
- a second holder, disposed at a position facing the first holder, having an attraction surface configured to attract a second substrate to be bonded to the first substrate;
- an attracting pressure generator configured to generate an attracting pressure in the attraction surface;
- and
- a lift pin configured to space the second substrate on the attraction surface apart from the second holder,
- wherein the second holder is provided with a space including an opening through which the lift pin passes, and
- the space is controlled to have a pressure lower than an atmospheric pressure,
- wherein the second holder comprises:
- a housing forming the space;
- a driving unit configured to drive the lift pin;
- and
- a bellows, disposed between the housing and the driving unit, having an inside connected to the space.
A bonding method, comprising:
- holding a first substrate with a first holder;
- holding a second substrate by generating an attracting pressure in an attraction surface of a second holder disposed at a position facing the first holder;
- and
- bonding the first substrate and the second substrate,
- wherein in the bonding of the first substrate and the second substrate, a space, provided in the second holder and provided with an opening through which a lift pin configured to space the second substrate on the attraction surface apart from the second holder passes, is controlled to have a pressure lower than an atmospheric pressure, the second holder comprising:
- a housing forming the space;
- a driving unit configured to drive the lift pin;
- and a sealing member, disposed between the housing and the driving unit, configured to close a gap between the housing and the lift pin when the first substrate and the second substrate are bonded,
- wherein the sealing member is an O-ring seal.
Dependencies are inferred from the claim text.