Cleaning member mounting mechanism and substrate cleaning apparatus
AssigneeEbara Corporation
InventorsMitsuru Miyazaki, Tomoaki Fujimoto, Takuya Inoue
Life of this patent
Estimating the term…
Abstract
A cleaning member mounting mechanism has: a cleaning member holding part, to which a cleaning member assembly having a cleaning member for cleaning a substrate W can be mounted; a member rotation part for rotating the cleaning member assembly held by the cleaning member holding part; and a moving part which moves the cleaning member holding part along an axial direction when the cleaning member assembly is removed, thereby to bring the cleaning member holding part into a rotation fixed position to restrict a rotation of the cleaning member holding part.
Claims8
A cleaning member mounting mechanism comprising:
- a cleaning member holding part, to which a cleaning member assembly having a cleaning member for cleaning a substrate can be mounted;
- a member rotation part for rotating the cleaning member assembly held by the cleaning member holding part;
- and
- a moving part which moves the cleaning member holding part along an axial direction when the cleaning member assembly is removed, thereby to bring the cleaning member holding part into a rotation fixed position to restrict a rotation of the cleaning member holding part, wherein
- the cleaning member holding part has a peripheral edge protruding part which protrudes peripherally outward, and
- the rotation of the cleaning member holding part is restricted by the peripheral edge protruding part coming into surface contact with an inner surface of a housing part.
A substrate cleaning apparatus comprising:
- a substrate support part for supporting a substrate;
- a cleaning member holding part, to which a cleaning member assembly having a cleaning member for cleaning the substrate can be mounted;
- a member rotation part for rotating the cleaning member assembly held by the cleaning member holding part;
- and a moving part which moves the cleaning member holding part along an axial direction when the cleaning member assembly is removed, thereby to bring the cleaning member holding part into a rotation fixed position to restrict a rotation of the cleaning member holding part, wherein the cleaning member holding part has a peripheral edge protruding part which protrudes peripherally outward, and the rotation of the cleaning member holding part is restricted by the peripheral edge protruding part coming into surface contact with an inner surface of the housing part.
Dependencies are inferred from the claim text.