Method of preparing and analyzing thin films
AssigneeYangtze Memory Technologies Co., Ltd.
InventorJing Liu
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Abstract
Aspects of the disclosure provide a method of preparing a focused ion beam (FIB) sample and analyzing the sample in an electron microscope system. The method can include forming, over a substrate, a target film having a thickness of less than a threshold corresponding to a limit for FIB requirements, and forming a supporting film over the target film. The method can also include obtaining a FIB sample that includes a portion of the target film and a portion of the supporting film and. The method can further include analyzing the obtained portion of the target film in an electron microscope system.
Claims20
A method of preparing a focused ion beam (FIB) sample, comprising:
- forming, over a planar substrate, a target film having a thickness of less than a threshold corresponding to a limit for FIB requirements;
- forming a supporting film over the target film;
- forming a buffer layer over the supporting film, wherein the buffer laver, the supporting film, the target film and the planar substrate are stacked in a direction perpendicular to the planar substrate;
- and
- after forming the supporting film and forming the buffer layer, obtaining the FIB sample that includes a portion of the target film and a portion of the supporting film.
A method of analyzing a sample in an electron microscope system, comprising:
- forming, over a planar substrate, a target film having a thickness of less than a threshold corresponding to a limit for FIB requirements;
- forming a supporting film over the target film;
- forming a buffer layer over the supporting film, wherein the buffer layer, the supporting film, the target film and the planar substrate are stacked in a direction perpendicular to the planar substrate;
- after forming the supporting film and forming the buffer layer, obtaining a FIB sample that includes a portion of the target film and a portion of the supporting film;
- and
- analyzing the obtained portion of the target film in an electron microscope system.
Dependencies are inferred from the claim text.