Multi-layer vacuum electron device and method of manufacture
AssigneeElve Inc.
InventorDiana Gamzina Daugherty
Life of this patent
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Abstract
Vacuum electron devices (VEDs) having a plurality of two-dimensional layers of various materials are bonded together to form one or more VEDs simultaneously. The two-dimensional material layers are machined to include features needed for device operation so that when assembled and bonded into a three-dimensional structure, three-dimensional features are formed. The two-dimensional layers are bonded together into a sandwich-like structure. The manufacturing process enables incorporation of metallic, magnetic, ceramic materials, and other materials required for VED fabrication while maintaining required positional accuracy and multiple devices per batch capability.
Claims16
A vacuum electron device, comprising:
- a first planar non-magnetic conductor plate;
- a second planar non-magnetic conductor plate;
- a plurality of planar non-magnetic interaction structure forming plates disposed between the first non-magnetic conductor plate and the second non-magnetic conductor plate,
- wherein the first non-magnetic conductor plate, the second non-magnetic conductor plate and the plurality of non-magnetic interaction structure forming plates are arranged in parallel and bonded together and the planar non-magnetic interaction structure forming plates include an RF interaction region.
A method for fabricating a vacuum electron device, the method comprising:
- forming a first planar non-magnetic conductor plate from a non-magnetic electrically conductive material;
- forming a second planar non-magnetic conductor plate from a non-magnetic electrically conductive material;
- forming an interaction structure from a plurality of electrically conductive non-magnetic interaction structure forming plates arranged in parallel with one another with portions of interaction zones cut into the respective electrically conductive non-magnetic interaction structure forming plates;
- disposing the first planar non-magnetic conductor plate, the interaction structure, and the second planar non-magnetic conductor plate in a stack such that the first planar non-magnetic conductor plate and the second planar non-magnetic conductor plate are on the outside of the stack;
- bonding the first planar non-magnetic conductor plate, the interaction structure, and the second planar non-magnetic conductor plate together.
Dependencies are inferred from the claim text.