Inspection result display device and storage medium

Abstract

Provided is a technique that allows an operator or the like to easily perceive a tendency of defects which are present in molds or patterns. A display device displays a result of inspection of a plurality of molds or a plurality of patterns which are inspection target objects. The display device classifies the inspection target objects into a plurality of groups, generates, for each of the plurality of groups, a heat map image from a result of defect inspection of one or more of inspection target objects which are classified into the each of the plurality of groups, the heat map image representing a spatial distribution of defect occurrence frequencies; and causes a display to display one or more of the heat map images generated, the one or more heat map images corresponding to one or more groups specified by a user from among the plurality of groups.

Dependencies are inferred from the claim text.