Stud attachment device and stud attachment method with independent temperature/pressure control

A method of attaching a plurality of studs to a photomask using a stud attachment device, the stud attachment device including a body, and a plurality of holders extending from the body, the plurality of holders configured to receive the plurality of studs laid on respective ones thereof, the method comprising:

• measuring registration errors of the photomask;
• attaching the plurality of studs to the photomask;
• and
• independently controlling one or more of pressures by adjusting heights of the plurality of holders or temperatures of the plurality of holders while the stud attachment device attaches the plurality of studs to the photomask.

A stud attachment device configured to attach a plurality of studs to a photomask, the stud attachment device comprising:

• a body;
• a plurality of holders extending from the body, the plurality of holders configured to receive the plurality of studs laid on respective ones thereof;
• a pressure regulator configured to independently control pressures of the plurality of holders by adjusting heights of the plurality of holders while the stud attachment device attaches the plurality of studs to the photomask;
• and
• a temperature regulator configured to independently control temperatures of the plurality of holders while the stud attachment device attaches the plurality of studs to the photomask, wherein
• the plurality of studs are configured to couple the photomask to a pellicle to form a reticle that includes the photomask, the pellicle, and the plurality of studs, and
• the pellicle includes,
• a thin-film membrane having a transmissivity of about 80% or more for extreme ultraviolet (EUV) light,
• a support member at an edge of the thin-film membrane, the support member configured to support the thin-film membrane,
• a plurality of fixtures configured to couple to respective ones of the plurality of studs, and
• a frame including a plurality of grooves configured to receive respective ones of the plurality of fixtures, the frame configured to support the support member.