Engineered electro-optic devices
AssigneePsiquantum, Corp.
InventorsYong Liang, Mark G. Thompson, Chia-Ming Chang, Vimal Kumar Kamineni
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Abstract
An electro-optic device includes a substrate and a waveguide on the substrate. The waveguide includes a layer stack including a plurality of electro-optic material layers interleaved with a plurality of interlayers and a waveguide core adjacent to the layer stack. The waveguide may include a pair of electrodes in electrical contact with the plurality of electro-optic material layers. The plurality of interlayers maintains a first lattice structure at room temperature and a cryogenic temperature. The plurality of electro-optic material layers maintains a second lattice structure and crystallographic phase at the room temperature and the cryogenic temperature.
Claims20
A wafer comprising:
- a substrate comprising silicon or germanium;
- a buffer layer coupled to the substrate and configured to relieve stress within the wafer;
- and
- a layer stack disposed on a top surface of the buffer layer, the layer stack including:
- a plurality of electro-optic material layers;
- and
- a plurality of interlayers interleaved with the plurality of electro-optic material layers,
- wherein the plurality of interlayers maintains a first lattice structure at a room temperature and at a cryogenic temperature;
- and
- wherein the plurality of electro-optic material layers are under tensile stress and maintain a second lattice structure and crystallographic phase at the room temperature and the cryogenic temperature.
An electro-optic device comprising:
- a substrate;
- a waveguide disposed on top of the substrate;
- a layer stack disposed on top of the waveguide and including a plurality of electro-optic material layers interleaved with a plurality of interlayers;
- and
- a waveguide core disposed on top of a portion of the layer stack;
- wherein the plurality of interlayers maintains a first lattice structure at a room temperature and at a cryogenic temperature;
- and
- wherein the plurality of electro-optic material layers are under tensile stress and maintain a second lattice structure and crystallographic phase at the room temperature and the cryogenic temperature.
Dependencies are inferred from the claim text.