Edge couplers with a high-elevation assistance feature
AssigneeGlobalFoundries U.S. Inc.
InventorYusheng Bian
Life of this patent
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Abstract
Structures for an edge coupler and methods of fabricating a structure for an edge coupler. The structure comprises an edge coupler including a first waveguide core and a second waveguide core. The first waveguide core is positioned in a vertical direction between the second waveguide core and a substrate. The first waveguide core has a first longitudinal axis, the second waveguide core has a second longitudinal axis, and the second longitudinal axis of the second waveguide core is slanted at an angle relative to the first longitudinal axis of the first waveguide core.
Claims20
A structure comprising:
- a substrate;
- and
- an edge coupler including a first waveguide core and a second waveguide core, the first waveguide core positioned in a vertical direction between the second waveguide core and the substrate, the second waveguide core including a first section and a second section, the first section of the second waveguide core having an end surface that terminates the second waveguide core and a width dimension that increases with increasing distance from the end surface, the first waveguide core having a first longitudinal axis, the second waveguide core having a second longitudinal axis, the first section of the second waveguide core positioned along the second longitudinal axis between the second section and the end surface of the second waveguide core, and the second longitudinal axis of the second waveguide core slanted at a first angle relative to the first longitudinal axis of the first waveguide core,
- wherein the second section of the second waveguide core is a bend that terminates the second waveguide core adjacent to the end surface of the second waveguide core.
A structure comprising:
- a substrate;
- an edge coupler including a first waveguide core and a second waveguide core, the first waveguide core positioned in a vertical direction between the second waveguide core and the substrate, the first waveguide core having a first longitudinal axis, the second waveguide core having a second longitudinal axis, and the second longitudinal axis of the second waveguide core slanted at a first angle relative to the first longitudinal axis of the first waveguide core, the first waveguide core having an end surface;
- and
- a semiconductor laser positioned adjacent to the end surface of the first waveguide core, the semiconductor laser configured to provide light in a mode propagation direction toward the edge coupler.
A structure comprising:
- a substrate;
- and
- an edge coupler including a first waveguide core and a second waveguide core, the first waveguide core positioned in a vertical direction between the second waveguide core and the substrate, the first waveguide core having a first longitudinal axis, the second waveguide core having a second longitudinal axis, and the second longitudinal axis of the second waveguide core slanted at a first angle relative to the first longitudinal axis of the first waveguide core,
- wherein the second waveguide core is spaced in the vertical direction above the first waveguide core by a distance in a range of 500 nanometers to 1.5 microns.
Dependencies are inferred from the claim text.