Method for producing an optical component having a coated internal structure and optical component produced by said method
AssigneeJenoptik Aktiengesellschaft
InventorsTina Rabis, Joerg-Peter Schmidt, Benjamin Hoehn
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Abstract
The invention relates to a method for producing an optical component consisting of at least two individual parts, which together enclose an open cavity, wherein the timer sides delimiting the cavity are coated or structured, and from which previously material has been removed in zones in the region of the free aperture, wherein said region is recoated and the individual parts are connected to one another by wringing. The wringing height is greater than the removal height plus the height of the coating. The invention also relates to optical components which are produced according to this method.
Claims15
An optical component, comprising a number N of individual parts, which are wrung together at at least N−1 planar joining surfaces by way of molecular or atomic forces of attraction, wherein
- a cavity is present in a cross section of the optical component, said cavity being arranged in the interior of the optical component and being surrounded by the N individual parts, wherein
- a first individual part Eh has at least one first coating surface with a first coating applied thereon and the first coating surface has at least one first planar partial region, and
- the first individual part has at least one first joining surface FF1 from the set of the N−1 joining surfaces, and
- the first coating on the first planar partial region is set back by a parallel offset Δt in relation to the first joining surface FF1, and
- the parallel offset Δt is less than 200 nm, and
- the first coating is arranged in the interior of the optical component, and
- wherein the optical component is provided for at least one design wavelength and/or a design wavelength range, and the parallel offset Δt is less than the design wavelength and/or the minimum value of the design wavelength range.
An optical component, comprising a number N of individual parts, which are wrung together at at least N−1 planar joining surfaces, wherein
- a cavity is present in a cross section of the optical component, said cavity being arranged in the interior of the optical component and being surrounded by the N individual parts, wherein
- a first individual part ET1 has at least one first coating surface with a first coating applied thereon and the first coating surface has at least one first planar partial region,
- the first individual part has at least one first joining surface FF1 from the set of the N−1 joining surfaces,
- the first coating on the first planar partial region is set back by a parallel offset Δt in relation to the first joining surface FF1,
- the parallel offset Δt is less than 200 nm,
- the first coating is arranged in the interior of the optical component, and
- wherein the optical component is provided for at least one design wavelength and/or a design wavelength range, and the parallel offset Δt is less than the design wavelength and/or the minimum value of the design wavelength range.
Dependencies are inferred from the claim text.