MEMS device with a three-layer comb actuator structure and a two-layer hinge
AssigneeLumentum Operations LLC
InventorsWenlin Jin, Stephen Bagnald, Gonzalo Wills
Life of this patent
Estimating the term…
Abstract
A micro-sized optical device may comprise a mirror suspended on a set of hinges that are mounted to the substrate and that are configured to tilt the mirror about an axis, wherein a hinge of the set of hinges is a two-layer structure with a pivot point that aligns with a mass center of the mirror; and a three-layer comb actuator structure associated with the hinge of the set of hinges, wherein the three-layer comb actuator structure includes a rotor comb actuator, a first stator comb actuator, and a second stator comb actuator.
Claims20
A micro-sized mechanical structure comprising:
- a substrate;
- a first layer adjacent to the substrate, a second layer adjacent to the first layer, and a third layer adjacent to the second layer;
- a gimbal suspended on a set of first hinges that are mounted to the substrate and that are configured to tilt the gimbal about a first axis, wherein the gimbal forms part of the second layer;
- a first comb actuator structure associated with a first hinge of the set of first hinges, wherein the first comb actuator structure includes a rotor comb actuator that forms part of the second layer and two stator comb actuators that respectively form part of the first layer and part of the third layer;
- a mirror suspended on a set of second hinges that are mounted to the gimbal via a set of anchors and that are configured to tilt the mirror about a second axis;
- and
- a second comb actuator structure associated with a second hinge of the set of second hinges, wherein the second comb actuator structure includes an additional rotor comb actuator that forms part of the third layer and two additional stator comb actuators that respectively form part of the first layer and part of the second layer.
A micro-sized mechanical structure comprising:
- a substrate;
- a first layer adjacent to the substrate, a second layer adjacent to the first layer, and a third layer adjacent to the second layer;
- a gimbal suspended on a set of first hinges that are mounted to the substrate and that are configured to tilt the gimbal about a first axis,
- wherein the gimbal forms part of the second layer;
- a first comb actuator structure associated with a first hinge of the set of first hinges,
- wherein the first comb actuator structure includes a rotor comb actuator that forms part of the second layer and two stator comb actuators that respectively form part of the first layer and part of the third layer, and
- wherein the first hinge of the set of first hinges is a two-layer structure comprising:
- a double beam structure on a layer of the two-layer structure of the first hinge, and
- a single beam structure on another layer of the two-layer structure of the first hinge;
- a mirror suspended on a set of second hinges that are mounted to the gimbal via a set of anchors and that are configured to tilt the mirror about a second axis;
- and
- a second comb actuator structure associated with a second hinge of the set of second hinges,
- wherein the second comb actuator structure includes an additional rotor comb actuator that forms part of the third layer and two additional stator comb actuators that respectively form part of the first layer and part of the second layer.
Dependencies are inferred from the claim text.