Testing machine and testing method
AssigneeChangxin Memory Technologies, Inc.
InventorsKang Lv, Yang Xiong, Jian Hu
Life of this patent
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Abstract
Embodiments of the present application provide a testing equipment and a testing method. The testing equipment includes: a plurality of pad groups and a plurality of source measure units. Each of the pad groups has a stress pad. The stress pad is configured to connect an element under test. The source measure unit is configured to send an input signal to the element under test through the stress pad and measure an output signal of the element under test to acquire performance parameters of the element under test. The stress pads of at least two of the pad groups are connected to the corresponding source measure units at the same time. The embodiments of the present application help improve the testing efficiency.
Claims16
A testing equipment, comprising:
- a plurality of pad groups and a plurality of source measure units, each of the pad groups having a stress pad, the stress pad being configured to connect an element under test, a corresponding source measure unit of the source measure units being configured to send an input signal to the element under test through the stress pad and measure an output signal of the element under test to acquire performance parameters of the element under test, wherein the stress pads of at least two of the pad groups are connected to the corresponding source measure units a same time;
- wherein the stress pad of at least one of the pad groups is electrically connected to an accessory pad at another position through a metal lead, so as to be connected to the corresponding source measure unit through the accessory pad.
A testing equipment, comprising:
- a plurality of pad groups and a plurality of source measure units, each of the pad groups having a stress pad, the stress pad being configured to connect an element under test, a corresponding source measure unit of the source measure units being configured to send an input signal to the element under test through the stress pad and measure an output signal of the element under test to acquire performance parameters of the element under test, wherein the stress pads of at least two of the pad groups are connected to the corresponding source measure units at a same time;
- and
- wherein the pad groups comprise a first pad group and a second pad group, the stress pad of the first pad group and the stress pad of the second pad group are connected to the corresponding source measure units at the same time, the first pad group has a first ground pad, the second pad group has a second ground pad, and the first ground pad and the second ground pad are configured to connect the element under test and be grounded.
Dependencies are inferred from the claim text.