Accelerometer with translational motion of masses

A microelectromechanical systems (MEMS) accelerometer comprising:

• a substrate disposed in a plane defined by a first axis and a second axis perpendicular to the first axis;
• a first proof mass and a second proof mass coupled to the substrate and configured to translate in opposite directions of each other along a third axis perpendicular to the first and second axes, wherein the second proof mass is disposed within the first proof mass and the second proof mass is disposed between first and second anchors coupled to the substrate in a direction along the second axis;
• and
• at least one lever coupling the first proof mass to the second proof mass, wherein:
• the MEMS accelerometer is configured to detect acceleration along the third axis via detection of translation of the first and second proof masses along the third axis;
• and
• the MEMS accelerometer exhibits symmetry about the first and second axes.

A microelectromechanical systems (MEMS) accelerometer comprising:

• a substrate disposed in a plane defined by a first axis and a second axis perpendicular to the first axis;
• a first proof mass and a second proof mass coupled to the substrate via an anchor and configured to translate in opposite directions of each other along a third axis perpendicular to the first and second axes;
• at least one lever coupling the first proof mass to the second proof mass;
• and
• first and second anchor arms coupled to the anchor and comprising rigid beams extending outwardly from the anchor on opposite sides of the anchor, wherein:
• the at least one lever is coupled to the first anchor arm at a midpoint of the at least one lever;
• the MEMS accelerometer is configured to detect acceleration along the third axis via detection of translation of the first and second proof masses along the third axis;
• the MEMS accelerometer exhibits symmetry about the first and second axes;
• and
• wherein the MEMS accelerometer is further configured to detect acceleration along the first and/or second axes via detection of translation of the first and second proof masses along the first and/or second axes.

A microelectromechanical systems (MEMS) accelerometer, comprising:

• a substrate disposed in a plane defined by a first axis and a second axis perpendicular to the first axis;
• a first proof mass coupled to the substrate via an anchor disposed in a center of the MEMS accelerometer;
• a second proof mass coupled to the substrate via the anchor and to the first proof mass;
• a first lever coupled to the first proof mass and the second proof mass;
• and
• a second lever coupled to the first proof mass and the second proof mass, wherein:
• the first and second proof masses are configured to translate along a third axis perpendicular to the first and second axes in response to acceleration along the third axis;
• and
• the MEMS accelerometer exhibits symmetry about the first and second axes.

A microelectromechanical systems (MEMS) accelerometer, comprising:

• a substrate disposed in a plane defined by a first axis and a second axis perpendicular to the first axis;
• a first proof mass coupled to the substrate;
• a second proof mass coupled to the substrate and to the first proof mass, wherein the second proof mass is disposed between first and second anchors coupled to the substrate in a direction along the second axis;
• and
• first and second levers coupled to each of the first and second proof masses and disposed in- line with each other, wherein:
• the first and second proof masses are configured to translate along a third axis perpendicular to the first and second axes in response to acceleration along the third axis;
• and
• the MEMS accelerometer exhibits symmetry about the first and second axes.