US 11,892,465 B2Granted

Differential mems device and methods

AssigneeMovella Inc.

InventorsSanjay Bhandari, Giovanni Bellusci

Life of this patent

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Abstract

A MEMS device includes a first MEMS sensor associated with a first spatial plane and a second MEMS sensor is associated with a spatial second plane not co-planar with the first spatial plane, wherein the first MEMS sensor is configured to provide a first interrupt and a first data in response to a physical perturbation, wherein the second MEMS sensor is configured to provide a second interrupt and second data in response to the physical perturbation, and a controller configured to receive the first interrupt at a first time and the second interrupt at a second time different from the first time, wherein the controller is configured to determine a latency between the first time and the second time, and wherein the controller is configured to determine motion data in response to the first data, to the second data, and to the latency.

Claims20

Dependent claims

A sensor device comprising:

a plurality of MEMS sensors comprising a first MEMS sensor and a second MEMS sensor, wherein the first MEMS sensor is associated with a first spatial plane, wherein the second MEMS sensor is associated with a spatial second plane, wherein the first MEMS sensor is configured to provide a first set of data in response to a physical perturbation, wherein the second MEMS sensor is configured to provide a second set of data in response to the physical perturbation, wherein the first MEMS sensor is configured to provide a first reply in response to a first initialization signal, wherein the second MEMS sensor is configured to provide a second reply in response to a second initialization signal;
and
a controller coupled to the plurality of MEMS sensors, wherein the controller is configured to provide the first initialization signal to the first MEMS sensor and the second initialization signal to the second MEMS sensor, wherein the controller is configured to receive the first reply at a first time, wherein the controller is configured to receive the second reply at a second time, wherein the first time and the second time need not be identical, wherein the controller is configured to determine a latency in response to the first time and the second time, wherein the controller is configured to receive the first set of data and the second set of data, and wherein the controller is configured to synchronize the first set of data and the second set of data to form motion data in response to the latency.

A sensor device comprising:

a plurality of MEMS sensors comprising a first MEMS sensor and a second MEMS sensor, wherein the first MEMS sensor is associated with a first spatial plane, wherein the second MEMS sensor is associated with a spatial second plane, wherein the first MEMS sensor is configured to provide a first interrupt in response to a physical perturbation, wherein the first MEMS sensor is also configured to provide a first set of data in response to the physical perturbation, wherein the second MEMS sensor is configured to provide a second interrupt in response to the physical perturbation, wherein the second MEMS sensor is also configured to provide a second set of data in response to the physical perturbation;
and
a controller coupled to the plurality of MEMS sensors, wherein the controller is configured to receive the first interrupt at a first time, wherein the controller is configured to receive the second interrupt at a second time, wherein the first time and the second time need not be identical, wherein the controller is configured to determine a latency between the first time and the second time, wherein the controller is configured to receive the first set of data and the second set of data, wherein the controller is configured to synchronize the first set of data to the second set of data to form motion data in response to the latency.

A method for a sensor device comprising:

receiving, in a first MEMS sensor, a first initialization signal, and receiving, in a second MEMS sensor, a second initialization signal, wherein the first MEMS sensor is associated with a first spatial plane, wherein the second MEMS sensor is associated with a spatial second plane;
outputting, from the first MEMS sensor, a first reply in response to the first initialization signal;
outputting, from the second MEMS sensor, a second reply in response to the second initialization signal;
receiving, in a controller, the first reply at a first time;
receiving, in the controller, the second reply at a second time, wherein the first time and the second time need not be identical;
determining, in the controller, a latency between the first time and the second time;
outputting, from the first MEMS sensor, a first set of data in response to a physical perturbation;
outputting, from the second MEMS sensor, a second set of data in response to the physical perturbation;
receiving, in the controller, the first set of data at a third time;
receiving, in the controller, the second set of data at a fourth time;
and
determining, in the controller, motion data comprising the first set of data synchronized to the second set of data, in response to the third time, the fourth time and to the latency.

9 more elements

Dependencies are inferred from the claim text.

Facts

Application: 17/667,180Filed 8 Feb 2022 · continuation
Priority: 3 Aug 2018
Published: US 2022/0229084 A121 Jul 2022
Granted: 6 Feb 2024
Term ends: Not estimatedThe source records don’t support an estimate.

Classification12 codes

G01P 15/08
By making use of inertia forces using solid seismic masses: with conversion into electric or magnetic values
B81B 7/008
Microstructural systems ; Auxiliary parts of microstructural devices or systems: mEMS characterised by an electronic circuit specially adapted for…
B81B 7/02
Microstructural systems ; Auxiliary parts of microstructural devices or systems: containing distinct electrical or optical devices of particular…
G01P 15/18
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration: in two or more dimensions

Family

Application62/714,551Us provisional application · filed 3 Aug 2018
Application16/530,923Parent of this continuation · filed 2 Aug 2019
US 11,255,871 B1Parent of this continuation · filed 22 Feb 2022
US 2022/0229084 A1Pre-grant publication · published 21 Jul 2022
US 11,892,465 B2This patent

From the US filing history. Foreign family members aren’t listed.