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US 11,891,715 B2Granted
Paddle, processing apparatus having the paddle, and method of producing the paddle
AssigneeEbara Corporation
InventorsYasuyuki Masuda, Shao Hua Chang, Yoshitaka Mukaiyama, Masashi Shimoyama, Jumpei Fujikata
Life of this patent
Estimating the term…
Abstract
A paddle capable of reducing an influence of blocking the electric field and capable of improving its mechanical strength is disclosed. The paddle, which is configured to agitate a processing liquid in a processing tank by moving in the processing tank, includes a plurality of agitating beams that form a honeycomb structure. The honeycomb structure has a plurality of hexagonal through-holes formed by the plurality of agitating beams.
Claims13
A paddle for agitating an electroplating liquid in an electroplating tank, comprising:
- a frame comprising a top portion configured to be reciprocated in the electroplating liquid by a reciprocating mechanism;
- a plurality of agitating beams coupled to the frame, the plurality of agitating beams forming a honeycomb structure, the honeycomb structure having a plurality of hexagonal through-holes formed by the plurality of agitating beams, an arrangement direction of the plurality of hexagonal through-holes being inclined with respect to a longitudinal direction of the frame, wherein the agitating beams of the paddle cause the agitation of the electroplating liquid when moved in the electroplating tank by the reciprocating mechanism.
Dependencies are inferred from the claim text.