Mask and deposition apparatus including the same
AssigneeSamsung Display Co., Ltd.
InventorsYoungmin Moon, Jeongkuk Kim, Minho Moon, Ji-Hee Son, Seungyong Song, Areum Lee
Life of this patent
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AssigneeSamsung Display Co., Ltd.
InventorsYoungmin Moon, Jeongkuk Kim, Minho Moon, Ji-Hee Son, Seungyong Song, Areum Lee
Estimating the term…
A mask includes a protruding portion provided with a deposition hole formed therethrough and including an upper surface, a lower surface facing the upper surface, and a side surface disposed between the upper surface and the lower surface and inclined at an angle with respect to the lower surface, a peripheral portion including a first surface extending from the upper surface, a second surface facing the first surface and having a step difference with respect to the lower surface of the protruding portion, and a coating layer disposed on the protruding portion. The protruding portion includes at least one of a protrusion protruded from the side surface of the protruding portion and a groove formed by removing at least a portion of the protruding portion from the side surface of the protruding portion, and the coating layer covers at least one of the protrusion and the groove.
A mask comprising:
A deposition apparatus comprising:
Dependencies are inferred from the claim text.