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US 11,891,310 B2Granted
Degassing system, a degassing tower, and a water system having the same
AssigneeChangxin Memory Technologies, Inc.
InventorYi Chuan Cheng
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AssigneeChangxin Memory Technologies, Inc.
InventorYi Chuan Cheng
Estimating the term…
The present disclosure provides a pump-assisted degassing system, a vacuum degassing tower, and a water system having the same. The degassing system comprises a vacuum pump, connected with a degassing tower through a main pipeline, and configured to pump out a gas-liquid mixture from the degassing tower; a gas-liquid separator, connected with the vacuum pump in a closed loop through a circulation pipeline, and configured to perform gas-liquid separation on the gas-liquid mixture; and a booster pump, arranged on the main pipeline between the vacuum pump and the degassing tower, and configured to assist the vacuum pump to pump out the gas-liquid mixture. The vacuum pump and the booster pump constitute a two-stage pumping device. Only one vacuum pump is needed in the system, and the vacuum pump requires less circulating water and less motor power resulting in lower the equipment load loss in the operation efficiency.
A pump-assisted degassing system, comprising:
A vacuum degassing tower, comprising:
A water system, comprising:
Dependencies are inferred from the claim text.