Apparatus for supplying chemical liquid
AssigneeSemes Co., Ltd.
InventorsInseok Ha, Jinhyuck Yang, Jaeyoung Jang
Life of this patent
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Abstract
An apparatus for supplying a chemical liquid may include a stage on which a substrate is placed, a chemical liquid discharging member and a direction changing member. The chemical liquid discharging member may supply the chemical liquid onto at least two first regions of the substrate for first pixels along a first direction. Additionally, the chemical liquid discharging member may supply the chemical liquid onto at least two second regions of the substrate for second pixels along a second direction. The direction changing member may change a direction of the substrate from the second direction to the first direction.
Claims8
An apparatus for supplying a chemical liquid comprising:
- a stage on which a substrate is placed;
- a chemical liquid discharging member for supplying the chemical liquid onto at least two first regions of the substrate for first pixels along a first direction and for supplying the chemical liquid onto at least two second regions of the substrate for second pixels along a second direction;
- a direction changing member for changing a direction of the substrate from the second direction to the first direction;
- wherein the direction changing member includes a holding member for holding a portion of a bottom of the substrate and a rotating member for rotating the holding member;
- wherein the holding member provides a vacuum suction to the portion of the bottom of the substrate;
- and wherein the holding member simultaneously provides the vacuum suction and an air injection to the portion of the bottom of the substrate.
An apparatus for supplying a chemical liquid comprising:
- a stage on which a substrate having a relatively long side and a relatively short side is placed;
- a transferring member for holding an end portion of the relatively long side of the substrate or an end portion of the relatively short side of the substrate to transfer the substrate;
- a chemical liquid discharging member for supplying the chemical liquid onto at least two first regions of the substrate for first pixels along a first direction and for supplying the chemical liquid onto at least two second regions of the substrate for second pixels along a second direction;
- a direction changing member for changing a direction of the substrate from the second direction to the first direction;
- wherein the direction changing member includes a holding member for providing a vacuum suction to a central or peripheral portion of a bottom of the substrate and a rotating member for rotating the holding member;
- and wherein the holding member simultaneously provides the vacuum suction and an air injection to the bottom of the substrate.
Dependencies are inferred from the claim text.