Control method, storage medium, imprint method, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorShingo Ishida
Life of this patent
Estimating the term…
Abstract
A method of controlling a control apparatus for controlling a forming apparatus operable to form a layer of a formable material on a substrate is provided. The method includes acquiring data that specifies a drop amount and a drop position on the substrate of each of droplets, calculating a spread of each of the droplets assuming that a spread shape of each of the droplets is a polygon, and calculating a surface area of an overlapping region in which a region of a droplet that spreads into the polygon and a region of a recessed portion in the mold to be filled with the formable material overlap, and correcting, based on a result of the calculation, the data so that the recessed portion is filled with the formable material.
Claims10
A method of controlling a control apparatus for controlling a forming apparatus operable to form a layer of a formable material on a substrate by supplying a plurality of droplets of the formable material onto the substrate and then causing the plurality of droplets to merge by causing the plurality of droplets supplied onto the substrate and a mold to come into contact, the method comprising:
- acquiring data that specifies a drop amount and a drop position on the substrate of each of the plurality of droplets;
- calculating a spread of each of the plurality of droplets assuming that a spread shape of each of the plurality of droplets, for when the plurality of droplets are supplied onto the substrate in accordance with the data and then the plurality of droplets and the mold are caused to come into contact, is a polygon, and calculating a surface area of an overlapping region in which a region of a droplet that spreads into the polygon and a region of a recessed portion in the mold to be filled with the formable material overlap;
- and
- correcting, based on a result of the calculation, the data so that the recessed portion is filled by the formable material.
A method of controlling a control apparatus for controlling a forming apparatus operable to form a layer of a formable material on a substrate by supplying a plurality of droplets of the formable material onto the substrate and then causing the plurality of droplets to merge by causing the plurality of droplets supplied onto the substrate and a mold to come into contact, the method comprising:
- acquiring data that specifies a drop amount and a drop position on the substrate of each of the plurality of droplets;
- calculating a spread of each of the plurality of droplets assuming that a spread shape of each of the plurality of droplets, for when the plurality of droplets are supplied onto the substrate in accordance with the data and then the plurality of droplets and the mold are caused to come into contact, is a polygon, and calculating a surface area of an overlapping region in which a region of a droplet that spreads into the polygon and a region of a recessed portion in the substrate to be filled with the formable material overlap;
- and
- correcting, based on a result of the calculation, the data so that the formable material fills the recessed portion.
Dependencies are inferred from the claim text.