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US 11,890,643 B2Granted
Piezoelectric micromachined ultrasonic transducer and method of fabricating the same
AssigneeVanguard International Semiconductor Corporation
InventorsYou Qian, Joan Josep Giner de Haro, Rakesh Kumar, Jia Jie Xia
Life of this patent
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Abstract
A PMUT includes a substrate, a stopper, and a multi-layered structure, where the substrate includes a corner, and a cavity is disposed in the substrate. The stopper is in contact with the corner of the substrate and the cavity. The multi-layered structure is disposed over the cavity and attached to the stopper and the multi-layered structure includes at least one through hole in contact with the cavity.
Claims16
A piezoelectric micromachined ultrasonic transducer (PMUT), comprising:
- a substrate comprising a corner;
- a cavity disposed in the substrate and not penetrate through the substrate;
- a stopper being in contact with the corner of the substrate and the cavity;
- and
- a multi-layered structure disposed over the cavity and attached to the stopper, wherein the multi-layered structure comprises at least one through hole in contact with the cavity.
2 more elements
Dependencies are inferred from the claim text.