Highly retentive polyamide hollow fiber membranes produced via controlled shrinkage
AssigneeEntegris, Inc.
InventorsMaybelle Woo, Jeffrey E. Townley, Kwok-Shun Cheng
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Abstract
Described herein is a polyamide hollow fiber membrane and methods of making and using the hollow fiber membrane. The polyamide hollow fiber membrane has an isopropanol permeability of from about 5 L/m2 h bar to about 150 L/m2 h bar and a particle rejection percentage of about 100% for particles having a nominal diameter of from about 1 nm to about 25 nm. The polyamide hollow fiber membranes described herein are particularly useful for photoresist filtration, for example.
Claims11
A polyamide hollow fiber membrane, having an isopropanol permeability of from about 5 L/m2h bar to about 150 L/m2h bar, a mean bubble point of from about 50 psi to about 150 psi as measured with HFE-7200, and a particle rejection percentage of about 100% for particles having a nominal diameter of from about 1 nm to about 25 nm after being wound onto and dried on a compressible frame.
Dependencies are inferred from the claim text.