US 11,889,766 B2Granted

Miniature fluid actuator

AssigneeMicrojet Technology Co., Ltd.

InventorsHao-Jan Mou, Hsien-Chung Tai, Lin-Huei Fang, Yung-Lung Han, Chi-Feng Huang, Chun-Yi Kuo, Tsung-I Lin

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Abstract

A miniature fluid actuator is disclosed and includes a substrate, a chamber layer, a carrying layer and a piezoelectric assembly. The substrate has an inlet. The chamber layer is formed on the substrate and includes a first chamber in communication with the inlet, a resonance layer and a second chamber. The resonance layer has a central aperture in communication between the first chamber and the second chamber. The carrying layer includes a fixed region formed on the chamber layer, a vibration region, a connection portion and a vacant. The vibration region is located at a center of the fixed region and corresponding to the second chamber. The connection portion is connected between the fixed region and the vibration region. The vacant is formed among the fixed region, the vibration region and the connection portion. The piezoelectric assembly is formed on the vibration region.

Claims12

Dependent claims

A miniature fluid actuator comprising:

a substrate having at least one inlet;
a chamber layer formed on the substrate and comprising:
a first chamber connected to the at least one inlet;
a resonance layer having a central aperture, wherein the central aperture is in communication with the first chamber;
and
a second chamber spatially corresponding to the first chamber and in communication with the first chamber through the central aperture;
a carrying layer formed on the chamber layer and comprising:
a fixed region formed on the chamber layer;
a vibration region located at a center of the fixed region and spatially corresponding to the second chamber;
at least one connection portion connected between the fixed region and the vibration region;
and
at least one vacant formed among the fixed region, the vibration region and the at least one connection portion;
and
a piezoelectric assembly formed on the vibration region;
wherein the second chamber is arranged between the carrying layer and the resonance layer.

12 more elements

Dependencies are inferred from the claim text.