Semiconductor storage device and method for manufacturing semiconductor storage device
AssigneeKioxia Corporation
InventorsYasuhito Yoshimizu, Hiroshi Nakaki, Kazuaki Nakajima
Life of this patent
Estimating the term…
Loading patent…
AssigneeKioxia Corporation
InventorsYasuhito Yoshimizu, Hiroshi Nakaki, Kazuaki Nakajima
Estimating the term…
A semiconductor storage device includes first wiring layers stacked along a first direction, a first pillar including a first semiconductor layer and extending along the first direction through the first wiring layers, a second wiring layer disposed above the first pillar in the first direction and extending along a second direction perpendicular to the first direction, a semiconductor-containing layer including a first portion disposed on an upper end of the first pillar in the first direction, a second portion contacting the first portion and formed along the second wiring layer, and a third portion contacting an upper end of the second portion and extending along a third direction perpendicular to the first direction and crossing the second direction, and a first insulating layer between each of the first and second portions of the semiconductor-containing layer and the second wiring layer. An upper surface of the third portion contains a metal.
A semiconductor storage device, comprising:
A semiconductor storage device comprising:
A semiconductor storage device comprising:
Dependencies are inferred from the claim text.