Annealing system and annealing method integrated with laser and microwave

An annealing system integrated with laser and microwave, comprising:

• a microwave system, the microwave system provides a microwave energy to a first area of a to-be-annealed object for annealing the first area of the to-be-annealed object;
• a laser system, the laser system provides a laser energy to a second area of the to-be-annealed object for annealing the second area of the to-be-annealed object, wherein the microwave energy provided by the microwave system is provided to the first area along a first axial direction, the laser energy provided by the laser system is provided to the second area along a second axial direction, and wherein a first time interval during which the microwave system provides the microwave energy to the first area covers a second time interval during which the laser system provides the laser energy to the second area;
• and
• a measurement and control system, the measurement and control system comprising a temperature measuring device, a power measuring device and a control device, the temperature measuring device monitoring a temperature value of the to-be-annealed object, the power measuring device measuring a power variation of at least one of the microwave energy provided by the microwave system and the laser energy provided by the laser system, wherein the control device correspondingly adjusts a first power of the microwave system providing the microwave energy and adjusts a second power of the laser system providing the laser energy according to the temperature value and the power variation.