Vacuum pump and heating device therefor
AssigneeEdwards Japan Limited
InventorsYoshinobu Ohtachi, Yasushi Maejima, Tsutomu Takaada
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AssigneeEdwards Japan Limited
InventorsYoshinobu Ohtachi, Yasushi Maejima, Tsutomu Takaada
Estimating the term…
A vacuum pump suitable for prolonging the life of a heating means used as a measure to prevent product deposition in the vacuum pump, and a heating device for the vacuum pump. A vacuum pump that exhausts gas by rotation of a rotating body has an exhaust flow path for exhausting the gas, and a heating means for heating the exhaust flow path, wherein the heating means has a plurality of resistance heating elements connected in parallel to a pair of wiring lines. The heating means has a current measuring means for measuring a sum of values of currents flowing through the plurality of resistance heating elements, a determination means for determining failure conditions of the plurality of resistance heating elements on the basis of a measured value obtained by the current measuring means, and an output means for outputting the failure conditions determined by the determination means.
A vacuum pump that exhausts gas by rotation of a rotating body, the vacuum pump comprising:
Dependencies are inferred from the claim text.