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US 11,889,283 B2Granted
Triple-membrane MEMS device
AssigneeInfineon Technologies AG
InventorsMarc Fueldner, Andreas Wiesbauer, Athanasios Kollias
Life of this patent
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Abstract
A system includes a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane, and the second membrane comprises a plurality of openings, a sealed low pressure chamber between the first membrane and the third membrane, and a plurality of electrodes in the sealed low pressure chamber.
Claims20
A microelectromechanical system (MEMS) apparatus comprising:
- a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane;
- a first low pressure region between the first membrane and the second membrane;
- a second low pressure region between the second membrane and the third membrane;
- a first stator in the first low pressure region;
- a second stator in the second low pressure region;
- and
- a plurality of pillars mechanically coupled to the first membrane, the second membrane and the third membrane, wherein at least one pillar of the plurality of pillars has a first terminal coupled to the first membrane, a second terminal coupled to the third membrane and a middle point coupled to the second membrane, and wherein at least one portion of the at least one pillar is a conductive portion being configured to electrically couple two membranes.
4 more elements
A triple-membrane MEMS device comprising:
- a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane, and the second membrane comprises a plurality of openings;
- a sealed low pressure chamber between the first membrane and the third membrane;
- a plurality of electrodes in the sealed low pressure chamber;
- and
- at least one pillar in the sealed low pressure chamber, the at least one pillar being mechanically coupled to the first membrane, the second membrane and the third membrane, wherein the at least one pillar comprises a non-conductive portion coupled between the first membrane and the second membrane, and a conductive portion coupled between the second membrane and the third membrane, and wherein the first membrane is isolated from the second membrane, and the second membrane is electrically coupled to the third membrane.
2 more elements
A microelectromechanical system (MEMS) apparatus comprising:
- a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane;
- a first low pressure region between the first membrane and the second membrane;
- a second low pressure region between the second membrane and the third membrane;
- a first stator in the first low pressure region;
- and
- a second stator in the second low pressure region, wherein the second membrane comprises a main portion and a panhandle portion, and wherein the main portion of the second membrane is connected to a read-out circuit through the panhandle portion.
3 more elements
Dependencies are inferred from the claim text.