MEMS device

A micro electro mechanical system (MEMS) device, comprising:

• a substrate having a back cavity passing through the substrate;
• a diaphragm connected to the substrate and covers the back cavity, wherein the diaphragm comprises a first membrane and a second membrane arranged opposite to each other, and an accommodating space is formed between the first membrane and the second membrane;
• a plurality of supports arranged in the accommodating space, and opposite ends of each of the plurality of supports are respectively connected to the first membrane and the second membrane;
• and
• a counter electrode arranged in the accommodating space and spaced apart from the first membrane and the second membrane,
• wherein a plurality of ventilation slots are provided on the diaphragm along a circumferential direction thereof and are annularly spaced from each other, the plurality of ventilation slots successively penetrate through the first membrane, the supports and the second membrane,
• the first membrane and the second membrane each comprises a first region and a second region, the first region extends from a center of the diaphragm toward an edge of the diaphragm and does not extend to the ventilation slots,
• the first region is an electrode region, the second region is located at a circumferential outer side of the first region, and
• the second region is formed by a semiconductor material without doping conductive ions, and the first region is formed by doping conductive ions in the semiconductor material.