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US 11,889,264 B2Granted
Fiber optic MEMS microphone
AssigneeOrta Dogu Teknik Universitesi
InventorsBaris Bayram, Asaf Behzat Sahin, Ilker Oguz, Goktug Cihan Ozmen, Ekin Muharrem Karaca, Do{hacek over (g)}a Buse Cavdir
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Abstract
A fiber optic MEMS microphone featuring an electrically deflectable MEMS membrane via a conversion of an optical energy propagating in an optical fiber cable to an electrical energy with a photodiode chip. The fiber optic MEMS microphone includes a MEMS device, the photodiode chip, a voltage, a power adjustable laser beam and a light.
Claims13
A fiber optic MEMS microphone, comprising:
- a MEMS device integrated at an end of an optical fiber cable,
- a photodiode chip placed on a top of the MEMS device,
- a voltage generated by the photodiode chip, wherein the photodiode chip is electrically wired to SIGNAL and GND pads of the MEMS device,
- wherein the MEMS device reflects a part of an incident laser light from a membrane back to the optical fiber cable, and allows a remaining part of the incident laser light to transmit through the membrane onto the photodiode chip,
- the membrane is coated with an optically reflective material for reflecting the incident laser light,
- the membrane has air holes for transmitting the incident laser light,
- a power adjustable laser beam by a laser diode, wherein the laser diode is biasing the MEMS device at different voltage values,
- wherein a light is used for a detection of a membrane displacement via a phase modulation or an intensity modulation of the incident laser light, and
- the light is also used in an energy transmission through the optical fiber cable for a generation of the voltage across the photodiode chip.
6 more elements
Dependencies are inferred from the claim text.