MEMS microphone

A MEMS microphone, including:

• a base with a back cavity;
• an electric capacitance system arranged on the base, including a back plate, a first diaphragm and a second diaphragm opposite to the back plate and arranged on an upper and lower sides of the back plate;
• an insulation layer isolating the base, the back plate, the first diaphragm and the second diaphragm;
• a sealing space formed between the first diaphragm and the second diaphragm;
• wherein
• the back plate comprises an intermediate main body area, a first edge area on one side of the intermediate main body area and a second edge area on the other side of the intermediate main body;
• a plurality of acoustic through holes are spaced in the intermediate main body area, and a plurality of supporting components penetrates through the acoustic through holes for connecting the first diaphragm to the second diaphragm, the MEMS microphone comprises a first release barrier structure located in the first edge area and penetrating the back plate, the first release barrier structure isolates the acoustic through hole and the insulation layer;
• the MEMS microphone further comprises a plurality of second release barriers located in the second edge area and spaced on the back plate;
• the second release barrier structure isolates the acoustic through hole from the insulation layer, a pressure in the sealing space is equal to an external pressure.