Vibration element, physical quantity sensor, inertial measurement unit, electronic apparatus, and vehicle
AssigneeSeiko Epson Corporation
InventorsSeiichiro Ogura, Keiichi Yamaguchi, Masahiro Oshio, Takashi Yamazaki
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Abstract
A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.
Claims14
A vibration element comprising:
- three axes orthogonal to each other being defined as an X-axis, a Y-axis, and a Z-axis;
- a base;
- and
- a vibrating arm extending from the base to a positive side of the Y-axis, wherein the vibrating arm is configured with:
- a weight;
- an arm positioned between the base and the weight;
- and
- a weight film disposed on the weight, the weight includes a first principal surface and a second principal surface that are perpendicular to the Z-axis and have a front and back relationship with each other,
- wherein a plane passing through a center of the arm in a Z-axis direction along the Z-axis and parallel to an X-Y plane containing the X-axis and the Y-axis is defined as a center plane,
- a center of gravity of the weight is on a first principal surface side with respect to the center plane, and
- a center of gravity of the weight film is on a second principal surface side with respect to the center surface,
- wherein the weight includes a first portion and a second portion, and the second portion is thinner than the first portion in the Z-axis direction,
- wherein the second principal surface has a stepped shape formed by the first portion and the second portion, and
- the second portion is arranged in a region from an end of the first portion on the positive side of the Y axis to an end of the weight on the positive side of the Y axis in a plan view from the Z-axis direction.
Dependencies are inferred from the claim text.