US 11,888,461 B2 · Acoustic wave device, acoustic wave filter, and composite filter device

An acoustic wave device comprising:

a silicon support substrate;
a silicon oxide film laminated above the silicon support substrate;
a lithium tantalate film laminated above the silicon oxide film;
an IDT electrode including an electrode finger and being provided above the lithium tantalate film;
and
a protection film covering at least a portion of the IDT electrode;
wherein
when a wavelength determined by an electrode finger pitch of the IDT electrode is denoted by λ, a wavelength normalized film thickness of the lithium tantalate film is denoted by TLT, θ of an Euler angle of the lithium tantalate film is denoted by θLT, a wavelength normalized film thickness of the silicon oxide film is denoted by TS, a wavelength normalized film thickness of the IDT electrode in terms of aluminum thickness being a product of a wavelength normalized film thickness of the IDT electrode and a value obtained when density of the IDT electrode is divided by density of aluminum is denoted by TE, a wavelength normalized film thickness of the protection film being a product of a value obtained when density of the protection film is divided by density of silicon oxide and a wavelength normalized film thickness which is a thickness of the protection film normalized by the wavelength λ is denoted by TP, a propagation direction in the silicon support substrate is denoted by ψSi, and a wavelength normalized film thickness which is a thickness of the silicon support substrate normalized by the wavelength λ is denoted by TSi, TLT, θLT, TS, TE, TP, and ψSi are set such that a value represented by Formula (1) below is larger than about −2.4:
I
h
=
(
a
T
L
⁢
T
(
2
)
⁢
(
(
T
L
⁢
T
-
c
T
L
⁢
T
)
2
-
b
T
LT
(
2
)
)
+
a
T
L
⁢
T
(
1
)
⁢
(
T
L
⁢
T
-
c
T
L
⁢
T
)
+
a
T
S
(
2
)
⁢
(
(
T
S
-
c
T
S
)
2
-
b
T
S
(
2
)
)
+
a
T
S
(
1
)
⁢
(
T
S
-
c
T
S
)
+
a
T
B
(
4
)
⁢
(
(
T
E
-
c
T
E
)
4
-
b
T
E
(
4
)
)
+
a
T
E
(
3
)
⁢
(
(
T
E
-
c
T
E
)
3
-
b
T
E
(
3
)
)
+
a
T
E
(
2
)
⁢
(
(
T
E
-
c
T
E
)
2
-
b
T
E
(
2
)
)
+
a
T
E
(
1
)
⁢
(
T
E
-
c
T
E
)
+
a
Ψ
Si
(
6
)
⁢
(
(
Ψ
Si
-
c
Ψ
Si
)
6
-
b
Ψ
Si
(
6
)
)
+
a
Ψ
S
⁢
i
(
5
)
(
(
Ψ
Si
-
c
Ψ
Si
)
5
-
b
Ψ
Si
(
5
)
)
+
a
Ψ
S
⁢
i
(
4
)
⁢
(
(
Ψ
Si
-
c
Ψ
S
⁢
i
)
4
-
b
Ψ
S
⁢
i
(
4
)
)
+
a
Ψ
S
⁢
i
(
3
)
(
(
Ψ
S
⁢
i
-
c
Ψ
Si
)
3
-
b
Ψ
Si
(
3
)
)
+
a
Ψ
Si
(
2
)
⁢
(
(
Ψ
Si
-
c
Ψ
S
⁢
i
)
2
-
b
Ψ
Si
(
2
)
)
+
a
Ψ
Si
(
1
)
⁢
(
Ψ
S
⁢
i
-
c
Ψ
S
⁢
i
)
+
a
θ
L
⁢
T
(
2
)
⁢
(
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
2
-
b
θ
L
⁢
T
(
2
)
)
+
a
θ
L
⁢
T
(
1
)
⁢
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
+
d
T
L
⁢
T
T
⁢
S
⁢
(
T
L
⁢
T
-
c
T
L
⁢
T
)
⁢
(
T
S
-
c
T
S
)
+
d
T
L
⁢
T
T
⁢
E
⁢
(
T
L
⁢
T
-
c
T
L
⁢
T
)
⁢
(
T
E
-
c
T
E
)
+
d
T
L
⁢
T
Ψ
⁢
Si
⁢
(
T
L
⁢
T
-
c
T
L
⁢
T
)
⁢
(
Ψ
S
⁢
i
-
c
Ψ
S
⁢
i
)
+
d
T
L
⁢
T
θ
⁢
L
⁢
T
⁢
(
T
L
⁢
T
-
c
T
L
⁢
T
)
⁢
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
+
d
T
S
T
E
⁢
(
T
S
-
c
T
S
)
⁢
(
T
E
-
c
T
E
)
+
d
T
S
Ψ
⁢
S
⁢
i
⁢
(
T
S
-
c
T
S
)
⁢
(
Ψ
S
⁢
i
-
c
Ψ
S
⁢
i
)
+
d
T
S
θ
⁢
L
⁢
T
⁢
(
T
S
-
c
T
S
)
⁢
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
+
d
T
E
Ψ
⁢
S
⁢
i
⁢
(
T
E
-
c
T
E
)
⁢
(
Ψ
S
⁢
i
-
c
Ψ
S
⁢
i
)
+
d
T
E
θ
⁢
L
⁢
T
⁢
(
T
E
-
c
T
E
)
⁢
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
+
d
Ψ
⁢
S
⁢
i
θ
⁢
L
⁢
T
⁢
(
Ψ
S
⁢
i
-
c
Ψ
Si
)
⁢
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
+
e
)
⁢
(
a
T
P
⁢
T
P
4
+
b
T
P
⁢
T
P
3
+
c
T
P
⁢
T
P
2
+
d
T
P
⁢
T
p
+
f
T
P
)
;
Formula
⁢
(
1
)
where, coefficients a, b, c, d, e, and f in Formula (1) are values described in Table 1 to Table 12 below that are determined in accordance with a crystal orientation of the silicon support substrate and a range of TS, TLT, and ψSi:
TABLE 1
Si(100)
0 < TLT < 0.2
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
0
0
bTLT(2)
0
0
cTLT
0
0
aTS(2)
0
0
aTS(1)
−5.857231176
−5.857231176
bTS(2)
0
0
cTS
0.148
0.148
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
−19.75255913
−19.75255913
aTE(1)
−2.877583447
−2.877583447
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0.022736
0.022736
cTE
0.242
0.242
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0
0
aψSi(2)
0.004788767
0.004788767
aψSi(1)
0.024306207
0.024306207
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
0
0
bψSi(2)
81.81
81.81
cψSi
8.7
8.7
aθLT(2)
−0.008235936
−0.008235936
aθLT(1)
−0.021048278
−0.021048278
bθLT(2)
65.16
65.16
cθLT
−52.2
−52.2
dTLTTS
0
0
dTLTTE
0
0
dTLTψSi
0
0
TTLTθLT
0
0
dTSTE
0
0
dTSψSi
0
0
dTSθLT
−0.786852571
−0.786852571
dTEψSi
0
0
dTEθLT
−0.237034335
−0.237034335
dψSiθLT
0
0
e
−1.499248378
−1.499248378
aTP
−111692
−111692
bTP
19239
19239
cTP
−952.97
−952.97
dTP
8.8027
8.8027
fTP
1.0495
1.0495;
TABLE 2
Si(100)
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
125.5342427
aTLT(1)
−13.43961051
−7.643409732
bTLT(2)
0
0.006076558
cTLT
0.329807692
0.321186441
aTS(2)
0
0
aTS(1)
−11.80744788
−10.05306878
bTS(2)
0
0
cTS
0.158653846
0.153389831
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
0
0
aTE(1)
0
−7.595099843
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0
0
cTE
0
0.366101695
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0
0
aψSi(2)
0.003335792
0
aψSi(1)
0.039268266
−0.013700762
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
0
0
bψSi(2)
191.7159763
0
cψSi
13.26923077
16.01694915
aθLT(2)
−0.007476194
0
aθLT(1)
−0.010867175
−0.053997369
bθLT(2)
69.19378698
0
cθLT
−50.19230769
−50.59322034
dTLTTS
0
0
dTLTTE
0
0
dTLTψSi
−0.629167148
−0.724576033
TTLTθLT
0
0
dTSTE
0
0
dTSψSi
0
0.521919406
dTSθLT
0
0
dTEψSi
0
−0.523966449
dTEθLT
0
0
dψSiθLT
0
0
e
−2.071831837
−3.228508418
aTP
−111692
−111692
bTP
19239
19239
cTP
−952.97
−952.97
dTP
8.8027
8.8027
fTP
1.0495
1.0495;
TABLE 3
Si(100)
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
−15.6141248
−15.6141248
bTLT(2)
0
0
cTLT
0.163309353
0.163309353
aTS(2)
0
0
aTS(1)
−22.02440893
−22.02440893
bTS(2)
0
0
cTS
0.325179856
0.325179856
aTE(4)
0
0
aTE(3)
−248.4374004
−248.4374004
aTE(2)
−36.57127964
−36.57127964
aTE(1)
13.88180854
13.88180854
bTE(4)
0
0
bTE(3)
0.000480119
0.000480119
bTE(2)
0.020416128
0.020416128
cTE
0.240647482
0.240647482
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0
0
aψSi(2)
0.002456326
0.002456326
aψSi(1)
0.048553126
0.048553126
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
0
0
bψSi(2)
279.6050929
279.6050929
cψSi
22.3381295
22.3381295
aθLT(2)
0
0
aθLT(1)
0.005427275
0.005427275
bθLT(2)
0
0
cθLT
−50.35971223
−50.35971223
dTLTTS
0
0
dTLTTE
0
0
dTLTψSi
0
0
TTLTθLT
0
0
dTSTE
41.63149071
41.63149071
dTSψSi
−0.577179204
−0.577179204
dTSθLT
0.603866778
0.603866778
dTEψSi
0.134944598
0.134944598
dTEθLT
0
0
dψSiθLT
0
0
e
−2.703317679
−2.703317679
aTP
−111692
−111692
bTP
19239
19239
cTP
−952.97
−952.97
dTP
8.8027
8.8027
fTP
1.0495
1.0495;
TABLE 4
Si(100)
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
133.7896555
aTLT(1)
−7.761727985
−9.701155851
bTLT(2)
0
0.006281971
cTLT
0.315508021
0.306914894
aTS(2)
0
0
aTS(1)
−20.35135077
−6.186650236
bTS(2)
0
0
cTS
0.297860963
0.298404255
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
110.8304316
0
aTE(1)
4.036561723
−8.229960495
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0.006431411
0
cTE
0.140374332
0.363297872
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0
0
aψSi(2)
0.002534654
0.001652947
aψSi(1)
0.024168138
−0.003241344
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
0
0
bψSi(2)
269.2484772
266.6845858
cψSi
21.4171123
20.26595745
aθLT(2)
0
0
aθLT(1)
0
−0.066116428
bθLT(2)
0
0
cθLT
−90
−50.4787234
dTLTTS
96.23533718
0
dTLTTE
−66.46866878
0
dTLTψSi
−0.404808481
−0.688053172
dTLTθLT
0
0
dTSTE
0
0
dTSψSi
−0.733337318
0
dTSθLT
0
0
dTEψSi
0.584322518
−0.372994212
dTEθLT
0
0
dψSiθLT
0
0
e
−3.679364607
−4.30794513
aTP
−111692
−111692
bTP
19239
19239
cTP
−952.97
−952.97
dTP
8.8027
8.8027
fTP
1.0495
1.0495;
TABLE 5
Si(110)
0 < TLT < 0.2
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−16.69742899
−16.69742899
−33.56520202
0
bTLT(2)
0
0
0
0
cTLT
0.1675
0.1675
0.192857143
0
aTS(2)
0
0
0
0
aTS(1)
15.90196012
15.90196012
0
0
bTS(2)
0
0
0
0
cTS
0.1525
0.1525
0
0
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
26.3030303
0
aTE(1)
0
0
−6.181053391
0
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0.006326531
0
cTE
0
0
0.378571429
0
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
−0.000183963
−0.000183963
0
−0.000177142
aψSi(2)
−0.003236307
−0.003236307
0
0.002186084
aψSi(1)
0.071460688
0.071460688
0.085067773
0.13561432
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
−5768.71875
−5768.71875
0
2642.857143
bψSi(2)
399.9375
399.9375
0
500
cψSi
65.25
65.25
34.28571429
55
aθLT(2)
0
0
0
−0.00533662
aθLT(1)
0
0
0.070255628
0.032718563
bθLT(2)
0
0
0
65.75963719
cθLT
−90
−90
−51.42857143
−50.95238095
dTLTTS
0
0
0
0
dTLTTE
0
0
0
0
dTLTψSi
1.873870705
1.873870705
0
0
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0
0
0.716151515
0
dψSiθLT
0
0
−0.00729303
0.002110378
e
−0.957101918
−0.957101918
−1.63492254
−1.290881853
aTP
−111692
−111692
−111692
−111692
bTP
19239
19239
19239
19239
cTP
−952.97
−952.97
−952.97
−952.97
dTP
8.8027
8.8027
8.8027
8.8027
fTP
1.0495
1.0495
1.0495
1.0495;
TABLE 6
Si(110)
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−23.96596978
−4.695531045
−7.344438725
−5.603099398
bTLT(2)
0
0
0
0
cTLT
0.34
0.3296875
0.338983051
0.306666667
aTS(2)
0
0
0
0
aTS(1)
−23.18485905
0
0
0
bTS(2)
0
0
0
0
cTS
0.175555556
0
0
0
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
−43.48595551
−70.50554427
−41.95412638
aTE(1)
0
−2.467954545
−5.460437635
−2.19025056
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0.006875
0.006716461
0.006819556
cTE
0
0.15
0.365254237
0.360666667
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0.000119479
−0.000172812
aψSi(2)
0.018474062
0
0.003987724
0.002213009
aψSi(1)
0.059131688
0
−0.047908658
0.073831446
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
−2384.203107
1647.952
bψSi(2)
81.55555556
0
216.791152
242.24
cψSi
35.33333333
0
30.76271186
62.6
aθLT(2)
0
0
0
0
aθLT(1)
0.009475371
0
0.026725166
0
bθLT(2)
0
0
0
0
cθLT
−49.3333333
−90
−49.83050847
−90
dTLTTS
0
0
0
0
dTLTTE
0
0
0
42.3018696
dTLTψSi
0
0
0
0
dTLTθLT
0.617240199
0
0
0
dTSTE
0
0
0
0
dTSψSi
2.612107038
0
0
0
dTSθLT
2.129359248
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0
0
0
0
dψSiθLT
0.871101002
0
0
0
e
−2.851861362
−2.210765625
−2.573237283
−2.440604203
aTP
−111692
−111692
−111692
−111692
bTP
19239
19239
19239
19239
cTP
−952.97
−952.97
−952.97
−952.97
dTP
8.8027
8.8027
8.8027
8.8027
fTP
1.0495
1.0495
1.0495
1.0495;
TABLE 7
Si(110)
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−10.87353735
−17.74612134
−16.74814911
−16.74814911
bTLT(2)
0
0
0
0
cTLT
0.167045455
0.158227848
0.168032787
0.168032787
aTS(2)
92.14417413
275.6432031
0
0
aTS(1)
−6.141913324
−0.713377524
−9.071522271
−9.071522271
bTS(2)
0.004213585
0.004749239
0
0
cTS
0.339772727
0.317721519
0.314754098
0.314754098
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
−37.82699975
0
0
0
aTE(1)
4.315324766
3.259148162
−5.270739047
−5.270739047
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0.007147469
0
0
0
cTE
0.153409091
0.138607595
0.356557377
0.356557377
aψSi(6)
0
0
−3.73552E−09
−3.73552E−09
aψSi(5)
0
0
−4.69013E−08
−4.69013E−08
aψSi(4)
0
0
1.07773E−05
1.07773E−05
aψSi(3)
0.000254041
−0.00026684
5.64997E−05
5.64997E−05
aψSi(2)
0.00704637
0.003350583
−0.007526984
−0.007526984
aψSi(1)
−0.123432463
0.05687546
−0.035719404
−0.035719404
bψSi(6)
0
0
1801696668
1801696668
bψSi(5)
0
0
6726299.443
6726299.443
bψSi(4)
0
0
1035415.498
1035415.498
bψSi(3)
−1197.310014
2539.305207
3573.665857
3573.665857
bψSi(2)
188.2457386
286.0358917
720.1088417
720.1088417
cψSi
28.125
63.60759494
48.19672131
48.19672131
aθLT(2)
0
0
0
0
aθLT(1)
0.046748629
0.00460971
0
0
bθLT(2)
0
0
0
0
cθLT
−51.59090909
−50.75949367
−90
−90
dTLTTS
0
0
0
0
dTLTTE
0
105.3055279
0
0
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
58.63016883
0
0
0
dTSψSi
0.443510572
0.274149566
0
0
dTSθLT
0
0
0
0
dTEψSi
0.293912516
−0.280924747
0
0
dTEθLT
0
0.457718571
0
0
dψSiθLT
0
−0.005165328
0
0
e
−1.722804167
−2.484892701
−2.976959016
−2.976959016
aTP
−111692
−111692
−111692
−111692
bTP
19239
19239
19239
19239
cTP
−952.97
−952.97
−952.97
−952.97
dTP
8.8027
8.8027
8.8027
8.8027
fTP
1.0495
1.0495
1.0495
1.0495;
TABLE 8
Si(110)
0.2 < TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
39.48011293
aTLT(1)
−5.239160454
−5.820942031
−4.867344296
−2.496300587
bTLT(2)
0
0
0
0.00654321
cTLT
0.309375
0.302702703
0.286363636
0.288888889
aTS(2)
24.40391167
40.38499201
20
40.45660337
aTS(1)
−2.128595361
−6.73354721
−3.626479228
−6.290401812
bTS(2)
0.006013184
0.005624543
0
0.005617284
cTS
0.3265625
0.275675676
0.31
0.272222222
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
−51.46488975
0
0
aTE(1)
−1.921891837
−0.509929613
−1.508039016
−0.870147512
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0.006479182
0
0
cTE
0.153125
0.147297297
0.341818182
0.351388889
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
−0.000165117
0
−9.55404E−05
aψSi(2)
0.000936051
0.00475603
0
0.002198207
aψSi(1)
−0.02141106
0.040196571
−0.017752634
0.036260775
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
2115.829763
0
1531.394676
bψSi(2)
246.9177246
196.5668371
0
199.8263889
cψSi
24.140625
57.97297297
21.13636364
60.41666667
aθLT(2)
0
0
0
−0.003220943
aθLT(1)
0.023743346
0.023741003
0.038368027
0.005042496
bθLT(2)
0
0
0
72.22222222
cθLT
−50.078125
−48.51351351
−50.81818182
−50
dTLTTS
0
0
0
−43.45862557
dTLTTE
−35.16960363
−48.00382984
23.6423037
52.46703277
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0.234382842
0
0
−0.273892853
dψSiθLT
0
−0.00130658
−0.001221935
0
e
−2.175330984
−2.239116787
−2.271294054
−2.496300587
aTP
−111692
−111692
−111692
−111692
bTP
19239
19239
19239
19239
cTP
−952.97
−952.97
−952.97
−952.97
dTP
8.8027
8.8027
8.8027
8.8027
fTP
1.0495
1.0495
1.0495
1.0495;
TABLE 9
Si(111)
0 < TLT < 0.2
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
16.07631847
20.22733656
30.72650306
27.83979251
bTLT(2)
0
0
0
0
cTLT
0.145833333
0.1625
0.159574468
0.158695652
aTS(2)
0
0
0
0
aTS(1)
17.08812597
27.84866827
31.28009383
12.67453621
bTS(2)
0
0
0
0
cTS
0.154166667
0.172916667
0.161702128
0.163043478
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
−96.15629371
0
138.3065683
0
aTE(1)
−1.263589744
2.883915191
−9.345807167
−7.807789594
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0.006649306
0
0.006229063
0
cTE
0.170833333
0.14375
0.369148936
0.345652174
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
0
−0.006862727
aψSi(1)
−0.101535567
−0.012511908
−0.101466433
0.176438509
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
0
114.9456522
cψSi
24.375
44.375
22.0212766
37.5
aθLT(2)
0
0
0
0
aθLT(1)
0
0
0
0
bθLT(2)
0
0
0
0
cθLT
−90
−90
−90
−90
dTLTTS
−477.9162005
−760.9473336
−1054.386561
−1044.340968
dTLTTE
0
0
0
0
dTLTψSi
0
1.332405924
0
0
dTLTθLT
0
0
0
0
dTSTE
0
−250.1524613
102.33575
105.8611165
dTSψSi
0
0
0
−2.093429604
dTSθLT
0
0
0
0
dTEψSi
−0.613440559
1.201832187
−0.525734733
dTEθLT
0
0
0
0
dψSiθLT
0
0
0
0
e
−0.553295028
−1.074792989
−1.290770348
−1.165057152
aTP
−111692
−111692
−111692
−111692
bTP
19239
19239
19239
19239
cTP
−952.97
−952.97
−952.97
−952.97
dTP
8.8027
8.8027
8.8027
8.8027
fTP
1.0495
1.0495
1.0495
1.0495;
TABLE 10
Si(111)
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
−262.3995984
−262.3995984
0
0
aTLT(1)
−59.70400634
−59.70400634
−18.45032018
−20.44479246
bTLT(2)
0.004691358
0.004691358
0
0
cTLT
0.355555556
0.355555556
0.332352941
0.331914894
aTS(2)
0
0
0
0
aTS(1)
−73.33869606
−73.33869606
−9.963926388
−24.5747574
bTS(2)
0
0
0
0
cTS
0.185185185
0.185185185
0.166176471
0.165957447
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
0
0
aTE(1)
−19.84024877
−19.84024877
−8.905455835
−17.17093947
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0
0
cTE
0.157407407
0.157407407
0.369117647
0.373404255
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
−4.69771E−05
−4.69771E−05
0
0
aψSi(3)
−0.000362538
−0.000362538
0
0
aψSi(2)
0.055133453
0.055133453
−0.004320224
0.021125116
aψSi(1)
0.020862911
0.020862911
−0.110606012
−0.064218508
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
138552.1512
138552.1512
0
0
bψSi(3)
−78.36076818
−78.36076818
0
0
bψSi(2)
203.1635802
203.1635802
145.9775087
66.20642825
cψSi
33.05555556
33.05555556
19.41176471
34.46808511
aθLT(2)
0
0
0
0
aθLT(1)
−0.079155699
−0.079155699
000
0.057672719
bθLT(2)
0
0
0
0
cθLT
−49.81481481
−49.81481481
−90
−49.14893617
dTLTTS
0
0
0
0
dTLTTE
−254.5809235
−254.5809235
80.69948416
99.56817027
dTLTψSi
2.260189055
2.260189055
0
0
dTLTθLT
−0.785540829
−0.785540829
000
0
dTSTE
−292.5762951
−292.5762951
0
0
dTSψSi
−5.914103654
−5.914103654
−1.139436429
0
dTSθLT
0
0
0
0
dTEψSi
1.75463008
1.75463008
0.660099875
−3.844659844
dTEθLT
0
0
0
0
dψSiθLT
0
0
0
0.006965097
e
−1.304804416
−1.304804416
−2.734683251
−3.115044468
aTP
−111692
−111692
−111692
−111692
bTP
19239
19239
19239
19239
cTP
−952.97
−952.97
−952.97
−952.97
dTP
8.8027
8.8027
8.8027
8.8027
fTP
1.0495
1.0495
1.0495
1.0495;
TABLE 11
Si(111)
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0.003649147
0
0
0
aTLT(1)
−17.27824731
−24.3903101
−38.65647339
−21.91795924
bTLT(2)
67.18624026
0
0
0
cTLT
0.154098361
0.15631068
0.17
0.1575
aTS(2)
84.63185118
0
148.7691928
140.0125491
aTS(1)
−6.307527081
−32.68184816
−15.38083251
−11.91949736
bTS(2)
0.004461166
0
0.005012245
0.004623438
cTS
0.352459016
0.345631068
0.331428571
0.33875
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
0
0
aTE(1)
2.909874306
8.840975559
−16.54803788
−0.024546617
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0
0
cTE
0.135245902
0.148058252
0.372857143
0.33125
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0.006216698
0
0
aψSi(1)
−0.068574135
−0.018885558
−0.187578295
0.122573316
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
147.1439344
0
0
cψSi
22.62295082
43.10679612
22.71428571
39.1875
aθLT(2)
0
0
0
0
aθLT(1)
0.023219728
0.047846607
0.097088558
0.096327065
bθLT(2)
0
0
0
0
cθLT
−50.16393443
−50.38834951
−50.42857143
−51.25
dTLTTS
0
−144.763071
0
0
dTLTTE
0
0
−161.23455326
0
dTLTψSi
−0.827435588
0
0
1.107475984
dTLTθLT
0
0
0
0
dTSTE
0
103.0553675
−65.68497311
0
dTSψSi
0
−1.329400713
0.82928215
−0.646921162
dTSθLT
0
0
0
0
dTEψSi
−0.681669875
0.653050787
0.676734069
0.936807034
dTEθLT
0
0
0.481989709
0.52746173
dψSiθLT
0
0
0
0
e
−1.560056382
−2.656750279
−2.259351603
−1.805786084
aTP
−111692
−111692
−111692
−111692
bTP
19239
19239
19239
19239
cTP
−952.97
−952.97
−952.97
−952.97
dTP
8.8027
8.8027
8.8027
8.8027
fTP
1.0495
1.0495
1.0495
1.0495;
and
TABLE 12
Si(111)
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
77.3065693
243.6937004
0
aTLT(1)
−13.49335267
−9.878165228
−6.309863061
−12.90130633
bTLT(2)
0
0.00674795
0.006522811
0
cTLT
0.300961538
0.297350993
0.29858156
0.306818182
aTS(2)
133.2691939
160.4037443
82.71737336
100.5491122
aTS(1)
−9.215218873
−21.20902158
−9.283157312
−7.984268054
bTS(2)
0.006618898
0.005353274
0.006382979
0.005704201
cTS
0.314423077
0.303311258
0.3
0.311363636
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
90.39669198
0
0
aTE(1)
0.170720276
3.925569914
−15.08313602
−9.451928755
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0.006615499
0
0
cTE
0.15
0.147350993
0.363475177
0.346212121
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
−0.00740803
0
0
0
aψSi(1)
−0.220502432
0.083594751
−0.104344279
0.088096624
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
135.4659763
0
0
0
cψSi
20.76923077
43.70860927
17.87234043
41.47727273
aθLT(2)
0
0
0
0
aθLT(1)
−0.017420386
−0.012240534
0
0
bθLT(2)
0
0
0
0
cθLT
−50.28846154
−50.26490066
−90
−90
dTLTTS
149.298265
220.9283416
135.5319056
135.1493422
dTLTTE
0
0
0
−65.38520659
dTLTψSi
0
0
0
−0.663828772
dTLTθLT
−0.703824061
−0.739197646
0
0
dTSTE
122.4270642
0
−94.62792088
0
dTSψSi
0.714493384
−1.189155195
0
−1.017237669
dTSθLT
0
0
0
0
dTEψSi
0
0.558597609
0
0
dTEθLT
0.734424122
0.628956462
0
0
dψSiθLT
−0.003900657
0.003268439
0
0
e
−2.246432623
−2.691572945
−3.425676672
−3.236112132
aTP
−111692
−111692
−111692
−111692
bTP
19239
19239
19239
19239
cTP
−952.97
−952.97
−952.97
−952.97
dTP
8.8027
8.8027
8.8027
8.8027
fTP
1.0495
1.0495
1.0495
1.0495;

3,381 more elements

An acoustic wave device comprising:

a silicon support substrate;
a silicon oxide film laminated above the silicon support substrate;
a lithium tantalate film laminated above the silicon oxide film;
an IDT electrode including an electrode finger and being provided above the lithium tantalate film;
and
a protection film covering at least a portion of the IDT electrode;
wherein
when a wavelength determined by an electrode finger pitch of the IDT electrode is denoted by λ, a wavelength normalized film thickness of the lithium tantalate film is denoted by TLT, θ of an Euler angle of the lithium tantalate film is denoted by θLT, a wavelength normalized film thickness of the silicon oxide film is denoted by TS, a wavelength normalized film thickness of the IDT electrode in terms of aluminum thickness being a product of a wavelength normalized film thickness of the IDT electrode and a value obtained when density of the IDT electrode is divided by density of aluminum is denoted by TE, a wavelength normalized film thickness of the protection film being a product of a value obtained when density of the protection film is divided by density of silicon oxide and a wavelength normalized film thickness which is a thickness of the protection film normalized by the wavelength λ, is denoted by TP, a propagation direction in the silicon support substrate is denoted by ψSi, and a wavelength normalized film thickness which is a thickness of the silicon support substrate normalized by the wavelength λ, is denoted by TSi, TLT, θLT, TS, TE, TP, and ψSi are set such that a value represented by Formula (1) below is larger than about −2.4;
I
h
=
(
a
T
L
⁢
T
(
2
)
⁢
(
(
T
L
⁢
T
-
c
T
L
⁢
T
)
2
-
b
T
LT
(
2
)
)
+
a
T
L
⁢
T
(
1
)
⁢
(
T
L
⁢
T
-
c
T
L
⁢
T
)
+
a
T
S
(
2
)
⁢
(
(
T
S
-
c
T
S
)
2
-
b
T
S
(
2
)
)
+
a
T
S
(
1
)
⁢
(
T
S
-
c
T
S
)
+
a
T
B
(
4
)
⁢
(
(
T
E
-
c
T
E
)
4
-
b
T
E
(
4
)
)
+
a
T
E
(
3
)
⁢
(
(
T
E
-
c
T
E
)
3
-
b
T
E
(
3
)
)
+
a
T
E
(
2
)
⁢
(
(
T
E
-
c
T
E
)
2
-
b
T
E
(
2
)
)
+
a
T
E
(
1
)
⁢
(
T
E
-
c
T
E
)
+
a
Ψ
Si
(
6
)
⁢
(
(
Ψ
Si
-
c
Ψ
Si
)
6
-
b
Ψ
Si
(
6
)
)
+
a
Ψ
S
⁢
i
(
5
)
(
(
Ψ
Si
-
c
Ψ
Si
)
5
-
b
Ψ
Si
(
5
)
)
+
a
Ψ
S
⁢
i
(
4
)
⁢
(
(
Ψ
Si
-
c
Ψ
S
⁢
i
)
4
-
b
Ψ
S
⁢
i
(
4
)
)
+
a
Ψ
S
⁢
i
(
3
)
(
(
Ψ
S
⁢
i
-
c
Ψ
Si
)
3
-
b
Ψ
Si
(
3
)
)
+
a
Ψ
Si
(
2
)
⁢
(
(
Ψ
Si
-
c
Ψ
S
⁢
i
)
2
-
b
Ψ
Si
(
2
)
)
+
a
Ψ
Si
(
1
)
⁢
(
Ψ
S
⁢
i
-
c
Ψ
S
⁢
i
)
+
a
θ
L
⁢
T
(
2
)
⁢
(
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
2
-
b
θ
L
⁢
T
(
2
)
)
+
a
θ
L
⁢
T
(
1
)
⁢
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
+
d
T
L
⁢
T
T
⁢
S
⁢
(
T
L
⁢
T
-
c
T
L
⁢
T
)
⁢
(
T
S
-
c
T
S
)
+
d
T
L
⁢
T
T
⁢
E
⁢
(
T
L
⁢
T
-
c
T
L
⁢
T
)
⁢
(
T
E
-
c
T
E
)
+
d
T
L
⁢
T
Ψ
⁢
Si
⁢
(
T
L
⁢
T
-
c
T
L
⁢
T
)
⁢
(
Ψ
S
⁢
i
-
c
Ψ
S
⁢
i
)
+
d
T
L
⁢
T
θ
⁢
L
⁢
T
⁢
(
T
L
⁢
T
-
c
T
L
⁢
T
)
⁢
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
+
d
T
S
T
E
⁢
(
T
S
-
c
T
S
)
⁢
(
T
E
-
c
T
E
)
+
d
T
S
Ψ
⁢
S
⁢
i
⁢
(
T
S
-
c
T
S
)
⁢
(
Ψ
S
⁢
i
-
c
Ψ
S
⁢
i
)
+
d
T
S
θ
⁢
L
⁢
T
⁢
(
T
S
-
c
T
S
)
⁢
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
+
d
T
E
Ψ
⁢
S
⁢
i
⁢
(
T
E
-
c
T
E
)
⁢
(
Ψ
S
⁢
i
-
c
Ψ
S
⁢
i
)
+
d
T
E
θ
⁢
L
⁢
T
⁢
(
T
E
-
c
T
E
)
⁢
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
+
d
Ψ
⁢
S
⁢
i
θ
⁢
L
⁢
T
⁢
(
Ψ
S
⁢
i
-
c
Ψ
Si
)
⁢
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
+
e
)
⁢
(
a
T
P
⁢
T
P
4
+
b
T
P
⁢
T
P
3
+
c
T
P
⁢
T
P
2
+
d
T
P
⁢
T
p
+
f
T
P
)
;
Formula
⁢
(
1
)
where, coefficients a, b, c, d, e, and fin Formula (1) are values described in Table 13 to Table 24 below that are determined in accordance with a crystal orientation of the silicon support substrate and a range of TS, TLT, and ψSi:
TABLE 13
Si(100)
0 < TLT < 0.2
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
−5.687707928
−5.687707928
bTLT(2)
0
0
cTLT
0.139506173
0.139506173
aTS(2)
0
0
aTS(1)
5.653643283
5.653643283
bTS(2)
0
0
cTS
0.148148148
0.148148148
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
0
0
aTE(1)
−1.004369706
−1.004369706
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0
0
cTE
0.255555556
0.255555556
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
−0.000197083
−0.000197083
aψSi(2)
−0.003376583
−0.003376583
aψSi(1)
0.118081927
0.118081927
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
−379.4708632
−379.4708632
bψSi(2)
278.0521262
278.0521262
cψSi
23.14814815
23.14814815
aθLT(2)
0
0
aθLT(1)
0.128631041
0.128631041
bθLT(2)
0
0
cθLT
−49.32098765
−49.32098765
dTLTTS
0
0
dTLTTE
72.43278274
72.43278274
dTLTψSi
0.604747502
0.604747502
dTLTθLT
−1.743618251
−1.743618251
dTSTE
0
0
dTSψSi
0
0
dTSθLT
0.994157261
0.994157261
dTEψSi
0
0
dTEθLT
0.280889881
0.280889881
dψSiθLT
0.003095822
0.003095822
e
−5.638096455
−5.638096455
aTP
0
0
bTP
0
0
cTP
−15.448
−15.448
dTP
−2.9188
−2.9188
fTP
1.0599
1.0599;
TABLE 14
Si(100)
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE < 0.45
aTLT(2)
0
0
aTLT(1)
7.809960834
4.249755245
bTLT(2)
0
0
cTLT
0.30962963
0.302857143
aTS(2)
0
0
aTS(1)
0
−0.800874586
bTS(2)
0
0
cTS
0
0.150714286
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
0
0
aTE(1)
−3.563479635
9.07053135
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0
0
cTE
0.148518519
0.353571429
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
−0.000160979
0
aψSi(2)
−0.000757552
0.001332545
aψSi(1)
0.095765615
0.003836714
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
384.7407407
0
bψSi(2)
278.2222222
285.0956633
cψSi
21.33333333
20.89285714
aθLT(2)
0
0
aθLT(1)
0.043185248
0.033521037
bθLT(2)
0
0
cθLT
−50
−50.92857143
dTLTTS
0
0
dTLTTE
0
0
dTLTψSi
−0.383208698
−0.220029295
dTLTθLT
0
0
dTSTE
0
0
dTSψSi
0
0
dTSθLT
0
0.974573109
dTEψSi
0
0
dTEθLT
1.01389349
−1.078939399
dψSiθLT
0
0.002899732
e
−5.569590226
−5.29442278
aTP
0
0
bTP
0
0
cTP
−15.448
−15.448
dTP
−2.9188
−2.9188
fTP
1.0599
1.0599;
TABLE 15
Si(100)
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
−11.51287
−11.51287
bTLT(2)
0
0
cTLT
0.136328125
0.136328125
aTS(2)
0
0
aTS(1)
6.022608826
6.022608826
bTS(2)
0
0
cTS
0.305859375
0.305859375
aTE(4)
0
0
aTE(3)
−180.607873
−180.607873
aTE(2)
−1.347493816
−1.347493816
aTE(1)
4.841204365
4.841204365
bTE(4)
0
0
bTE(3)
−0.000227051
−0.000227051
bTE(2)
0.019179688
0.019179688
cTE
0.25625
0.25625
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0
0
aψSi(2)
−0.001342794
−0.001342794
aψSi(1)
0.25625
0.25625
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
0
0
bψSi(2)
275.7568359
275.7568359
cψSi
0.25625
0.25625
aθLT(2)
0
0
aθLT(1)
0.153688205
0.153688205
bθLT(2)
0
0
cθLT
−49.140625
−49.140625
dTLTTS
0
0
dTLTTE
0
0
dTLTψSi
0
0
dTLTθLT
−1.180623763
−1.180623763
dTSTE
0
0
dTSψSi
0
0
dTSθLT
0
0
dTEψSi
0
0
dTEθLT
0.41394071
0.41394071
dψSiθLT
0.003203013
0.003203013
e
−4.433641408
−4.433641408
aTP
0
0
bTP
0
0
cTP
−15.448
−15.448
dTP
−2.9188
−2.9188
fTP
1.0599
1.0599;
TABLE 16
Si(100)
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
119.666412
118.2359738
aTLT(1)
4.447768142
2.271979446
bTLT(2)
0.006371047
0.00699901
cTLT
0.31147541
0.30631068
aTS(2)
0
0
aTS(1)
−3.805216895
bTS(2)
0
0
cTS
0
0.298543689
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
117.8354557
121.7109482
aTE(1)
2.107193686
−0.578851453
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0.006775956
0.006610661
cTE
0.15
0.35631068
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0
0
aψSi(2)
−0.001658706
0
aψSi(1)
0.005677734
0.003834195
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
0
0
bψSi(2)
272.5477022
0
cψSi
20.90163934
20.02427184
aθLT(2)
0
0
aθLT(1)
0.051921544
0.050011808
bθLT(2)
0
0
cθLT
−48.36065574
−48.93203883
dTLTTS
0
0
dTLTTE
61.26575286
0
dTLTψSi
0
0
dTLTθLT
0
0
dTSTE
0
−82.22932804
dTSψSi
0
0
dTSθLT
0
−0.470524678
dTEψSi
0
0
dTEθLT
0.904198722
−0.776132158
dψSiθLT
0.003410501
0.003906326
e
−5.339814906
−5.463687811
aTP
0
0
bTP
0
0
cTP
−15.448
−15.448
dTP
−2.9188
−2.9188
fTP
1.0599
1.0599;
TABLE 17
Si(110)
0 < TLT < 0.2
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−7.587457615
−7.587457615
−7.587457615
−7.587457615
bTLT(2)
0
0
0
0
cTLT
0.174380165
0.174380165
0.174380165
0.174380165
aTS(2)
0
0
0
0
aTS(1)
−3.979714537
−3.979714537
−3.979714537
−3.979714537
bTS(2)
0
0
0
0
cTS
0.150413223
0.150413223
0.150413223
0.150413223
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
0
0
aTE(1)
−0.865040993
−0.865040993
−0.865040993
−0.865040993
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0
0
cTE
0.245867769
0.245867769
0.245867769
0.245867769
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
5.87537E−07
5.87537E−07
5.87537E−07
5.87537E−07
aψSi(3)
−8.59015E−07
−8.59015E−07
−8.59015E−07
−8.59015E−07
aψSi(2)
−0.001948222
−0.001948222
−0.001948222
−0.001948222
aψSi(1)
−0.027558032
−0.027558032
−0.027558032
−0.027558032
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
1129197.497
1129197.497
1129197.497
1129197.497
bψSi(3)
−1524.372996
−1524.372996
−1524.372996
−1524.372996
bψSi(2)
776.3813947
776.3813947
776.3813947
776.3813947
cψSi
41.52892562
41.52892562
41.52892562
41.52892562
aθLT(2)
0
0
0
0
aθLT(1)
0.018744549
0.018744549
0.018744549
0.018744549
bθLT(2)
0
0
0
0
cθLT
−49.25619835
−49.25619835
−49.25619835
−49.25619835
dTLTTS
140.6234074
140.6234074
140.6234074
140.6234074
dTLTTE
−25.20654793
−25.20654793
−25.20654793
−25.20654793
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0
0
0
0
dψSiθLT
0
0
0
0
e
−1.789519626
−1.789519626
−1.789519626
−1.789519626
aTP
0
0
0
0
bTP
0
0
0
0
cTP
−15.448
−15.448
−15.448
−15.448
dTP
−2.9188
−2.9188
−2.9188
−2.9188
fTP
1.0599
1.0599
1.0599
1.0599;
TABLE 18
Si(110)
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
39.68139696
39.68139696
aTLT(1)
−3.912934705
−3.912934705
−3.801935963
−3.801935963
bTLT(2)
0
0
0.00692398
0.00692398
cTLT
0.306451613
0.306451613
0.297857143
0.297857143
aTS(2)
0
0
0
0
aTS(1)
0
0
0
0
bTS(2)
0
0
0
0
cTS
0
0
0
0
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
0
0
aTE(1)
1.912614784
1.912614784
−6.089810932
−6.089810932
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0
0
cTE
0.148924731
0.148924731
0.347857143
0.347857143
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
8.78847E−06
8.78847E−06
aψSi(2)
−0.0004718
−0.0004718
−0.000160567
−0.000160567
aψSi(1)
0.003265633
0.003265633
−0.023574651
−0.023574651
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
2351.597668
2351.597668
bψSi(2)
847.4765869
847.4765869
880.2091837
880.2091837
cψSi
35.32258065
35.32258065
43.07142857
43.07142857
aθLT(2)
0.005014741
0.005014741
0
0
aθLT(1)
0.023115164
0.023115164
0.030121011
0.030121011
bθLT(2)
67.0626662
67.0626662
0
0
cθLT
−49.62365591
−49.62365591
−51.28571429
−51.28571429
dTLTTS
0
0
0
0
dTLTTE
0
0
0
0
dTLTψSi
0
0
0.125572529
0.125572529
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0.563162206
0.563162206
−0.417002414
−0.417002414
dψSiθLT
0
0
0
0
e
−2.002512986
−2.002512986
−2.550158637
−2.550158637
aTP
0
0
0
0
bTP
0
0
0
0
cTP
−15.448
−15.448
−15.448
−15.448
dTP
−2.9188
−2.9188
−2.9188
−2.9188
fTP
1.0599
1.0599
1.0599
1.0599;
TABLE 19
Si(110)
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
2.992014692
2.992014692
−1.461725087
−1.461725087
bTLT(2)
0
0
0
0
cTLT
0.156390977
0.156390977
0.155345912
0.155345912
aTS(2)
0
0
0
0
aTS(1)
−9.089925228
−9.089925228
−1.247751383
−1.247751383
bTS(2)
0
0
0
0
cTS
0.305263158
0.305263158
0.327672956
0.327672956
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
−130.6388144
−130.6388144
aTE(1)
5.773590917
5.773590917
−0.010504162
−0.010504162
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0.006662711
0.006662711
cTE
0.166541353
0.166541353
0.341823899
0.341823899
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
1.03604E−05
1.03604E−05
aψSi(2)
−0.000377109
−0.000377109
−0.000138558
−0.000138558
aψSi(1)
−0.013702515
−0.013702515
−0.028102653
−0.028102653
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
3096.349671
3096.349671
bψSi(2)
792.2381141
792.2381141
957.6361695
957.6361695
cψSi
41.39097744
41.39097744
43.20754717
43.20754717
aθLT(2)
0
0
0
0
aθLT(1)
0.015804666
0.015804666
0.028892246
0.028892246
bθLT(2)
0
0
0
cθLT
−49.32330827
−49.32330827
−49.62264151
−49.62264151
dTLTTS
0
0
−44.5976835
−44.5976835
dTLTTE
80.90186655
80.90186655
−150.2428298
−150.2428298
dTLTψSi
0
0
0.225109644
0.225109644
dTLTθLT
0
0
0
0
dTSTE
29.68261053
29.68261053
47.35851038
47.35851038
dTSψSi
0.136750854
0.136750854
0
0
dTSθLT
0
0
0
0
dTEψSi
−0.146211814
−0.146211814
0
0
dTEθLT
0.41229257
0.41229257
0
0
dψSiθLT
0
0
0
0
e
−2.596813807
−2.596813807
−2.049341112
−2.049341112
aTP
0
0
0
0
bTP
0
0
0
0
cTP
−15.448
−15.448
−15.448
−15.448
dTP
−2.9188
−2.9188
−2.9188
−2.9188
fTP
1.0599
1.0599
1.0599
1.0599;
TABLE 20
Si(110)
0.2 ≤ TLT ≤ 3 .5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−2.80791074
−2.80791074
0
0
bTLT(2)
0
0
0
0
cTLT
0.3069869
0.3069869
0
0
aTS(2)
0
0
0
0
aTS(1)
−5.618098986
−5.618098986
0
0
bTS(2)
0
0
0
0
cTS
0.286462882
0.286462882
0
0
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
−73.23839461
−73.23839461
aTE(1)
8.962154821
8.962154821
−5.710295136
−5.710295136
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0.007310763
0.007310763
cTE
0.167467249
0.167467249
0.330930233
0.330930233
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
0
0
aψSi(1)
0.003677309
0.003677309
0
0
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
0
0
cψSi
40.93886463
40.93886463
0
0
aθLT(2)
0.00527863
0.00527863
0
0
aθLT(1)
0.008431458
0.008431458
0
0
bθLT(2)
66.00179249
66.00179249
0
0
cθLT
−50.61135371
−50.61135371
−90
−90
dTLTTS
63.6265441
63.6265441
0
0
dTLTTE
0
0
0
0
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
57.20229582
57.20229582
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
−0.098212695
−0.098212695
0
0
dTEθLT
0.32576925
0.32576925
0
0
dψSiθLT
0
0
0
0
e
−2.431352404
−2.431352404
−2.39032093
−2.39032093
aTP
0
0
0
0
bTP
0
0
0
0
cTP
−15.448
−15.448
−15.448
−15.448
dTP
−2.9188
−2.9188
−2.9188
−2.9188
fTP
1.0599
1.0599
1.0599
1.0599;
TABLE 21
Si(111)
0 < TLT < 0.2
0 ≤ TS < 0.2
0.0 5 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
−26.67263869
−6.49243933
−20.61574251
−21.06290014
bTLT(2)
0
0
0
0
cTLT
0.15443038
0.175438596
0.160759494
0.156896552
aTS(2)
0
0
0
0
aTS(1)
−7.971316395
7.232224634
−16.40433051
−3.920556446
bTS(2)
0
0
0
0
cTS
0.14556962
0.133333333
0.144303797
0.144827586
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
−110.7824708
−133.1826499
0
aTE(1)
12.77975858
−10.04988717
5.027045348
−5.686378626
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0.006463527
0.006582278
0
cTE
0.151265823
0.144736842
0.35
0.35862069
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
−0.007219474
0
aψSi(1)
0.028716852
0.04192074
−0.016815807
0.008780601
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
125.0280404
0
cψSi
9.683544304
50
11.58227848
48.10344828
aθLT(2)
0.01035547
0
0
0.014789077
aθLT(1)
0.162093889
0.106646805
0.164306798
0.04587348
bθLT(2)
61.8811088
0
0
55.43995244
cθLT
−49.62025316
−50.35087719
−51.01265823
−51.20689655
dTLTTS
−609.1883956
−724.6623011
−297.9828576
−203.214973
dTLTTE
−215.420422
0
159.6303697
0
dTLTψSi
0
−3.771938969
2.003207828
−2.014745526
dTLTθLT
1.80686724
0
2.218853872
0
dTSTE
0
−307.4269587
0
0
dTSψSi
0
0
−1.097992723
0
dTSθLT
1.985202008
0
2.104127874
0
dTEψSi
0
0
−1.45135593
0
dTEθLT
−203.386471
1.145649707
0
0
dψSiθLT
2.42647485
0.004357557
0
0
e
−5.019952207
−2.13826109
−3.235663805
−3.326865691
aTP
0
0
0
0
bTP
0
0
0
0
cTP
−15.448
−15.448
−15.448
−15.448
dTP
−2.9188
−2.9188
−2.9188
−2.9188
fTP
1.0599
1.0599
1.0599
1.0599;
TABLE 22
Si(111)
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
45.51074293
−94.44342524
0
aTLT(1)
0.788515154
−3.454988617
−9.832405019
−3.192556866
bTLT(2)
0
0.006485261
0.006459172
0
cTLT
0.298058252
0.295238095
0.298461538
0.298913043
aTS(2)
0
0
0
0
aTS(1)
−8.97795964
1.31344944
0
0
bTS(2)
0
0
0
0
cTS
0.142718447
0.147619048
0
0
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
0
0
aTE(1)
9.791468713
0.170587985
−0.71523762
−10.72534988
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0
0
cTE
0.15776699
0.124603175
0.356153846
0.347826087
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0.003924448
0.001661439
0
0.00657999
aψSi(1)
0.15776699
−0.024952541
0.02404454
−0.067389114
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
148.4588557
132.0861678
0
152.6937618
cψSi
15.29126214
46.9047619
14.19230769
43.04347826
aθLT(2)
0
0
0
0
aθLT(1)
0.06700163
0.042141715
0.055240362
0.061747926
bθLT(2)
0
0
0
0
cθLT
−48.73786408
−50.15873016
−49.76923077
−49.45652174
dTLTTS
116.7290786
−78.78450728
0
0
dTLTTE
0
85.46351406
−49.85282875
0
dTLTψSi
−0.70199108
0.445481139
0
0.604657146
dTLTθLT
−0.726496636
0
0
0
dTSTE
0
−116.360096
0
0
dTSψSi
0
−0.622709588
0
0
dTSθLT
2.041329502
−0.339115637
0
0
dTEψSi
0
0.20688896
0
0
dTEθLT
0.774150432
0.439880407
−0.6608739
−1.068569294
dψSiθLT
−0.005400114
0.002667922
−0.004937546
0.006290209
e
−4.209434885
−1.791078273
−3.48174155
−3.934527612
aTP
0
0
0
0
bTP
0
0
0
0
cTP
−15.448
−15.448
−15.448
−15.448
dTP
−2.9188
−2.9188
−2.9188
−2.9188
fTP
1.0599
1.0599
1.0599
1.0599;
TABLE 23
Si(111)
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0 .25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
−4.673850215
0
−8.8586067
−1.957300157
bTLT(2)
0
0
0
0
cTLT
0.141509434
0
0.153125
0.16
aTS(2)
82.42811022
0
87.42203531
0
aTS(1)
−7.905282467
−4.948155925
−0.569845134
0.521030757
bTS(2)
0.006949092
0
0.006037326
0
cTS
0.294339623
0.314583333
0.297916667
0.285
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
53.51232744
−79.38404758
0
0
aTE(1)
10.58973083
10.26534018
8.135327356
−7.251553825
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0.006016376
0.005677083
0
0
cTE
0.183962264
0.1375
0.336458333
0.37
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
0
0.001429494
aψSi(1)
0.010122468
0.039888924
−0.016592245
−0.004853684
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
0
145.6875
cψSi
11.88679245
48.4375
14.0625
45.75
aθLT(2)
0
0
0
20
aθLT(1)
−0.005093912
0.011098836
0.047530531
0.04750516
bθLT(2)
0
0
0
0
cθLT
−50
−50.4166667
−50.72916667
−49.75
dTLTTS
0
0
91.19418307
251.5375225
dTLTTE
0
0
−156.3654518
0
dTLTψSi
0.322255595
0
0
−0.289820964
dTLTθLT
−0.768436344
0
−0.735737765
0
dTSTE
0
75.51836907
0
0
dTSψSi
−0.512402643
0.300543357
−0.724013025
0.245746891
dTSθLT
0
0
0
0
dTEψSi
0
0
−0.50556971
0
dTEθLT
0
0
0
0
dψSiθLT
0
0.002842264
0
0
e
−2.770026639
−2.638591885
−1.980941925
−2.412296494
aTP
0
0
0
0
bTP
0
0
0
0
cTP
−15.448
−15.448
−15.448
−15.448
dTP
−2.9188
−2.9188
−2.9188
−2.9188
fTP
1.0599
1.0599
1.0599
1.0599;
and
TABLE 24
Si(111)
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
4.449764983
0
−13.78321665
−10.59163435
bTLT(2)
0
0
0
0
cTLT
0.321052632
0
0.309146341
0.303164557
aTS(2)
0
0
0
0
aTS(1)
0
−3.433673203
−1.746861763
3.363230821
bTS(2)
0
0
0
0
cTS
0
0.283443709
0.287804878
0.293037975
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
86.18383552
0
aTE(1)
3.853394073
8.768511808
−1.86755053
−15.6861606
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0.007157942
0
cTE
0.181578947
0.135430464
0.356097561
0.363291139
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
0
0
aψSi(1)
0.014178515
0.049910217
−0.008697771
0.012742666
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
0
0
cψSi
12.63157895
45.99337748
15.09146341
45
aθLT(2)
0
0
0
0
aθLT(1)
0
0.061867934
0.051566965
0.028929641
bθLT(2)
0
0
0
0
cθLT
−90
−50.59602649
−50.30487805
−50.56962025
dTLTTS
0
0
0
−103.0440888
dTLTTE
0
0
0
0
dTLTψSi
−0.181721459
0
0
0
dTLTθLT
0
0
0
−0.608943868
dTSTE
0
113.1914268
−75.04640382
−82.04954672
dTSψSi
0
0
−0.554356722
0.673316097
dTSθLT
0
0
0
0
dTEψSi
0
0
−0.512800103
0
dTEθLT
0
0
−0.656702553
0
dψSiθLT
0
0
0
0
e
−2.401219798
−3.18651044
−3.93030224
−4.143483981
aTP
0
0
00
0
bTP
0
0
0
cTP
−15.448
−15.448
−15.448
−15.448
dTP
−2.9188
−2.9188
−2.9188
−2.9188
fTP
1.0599
1.0599
1.0599
1.0599.

3,378 more elements

An acoustic wave device comprising:

a silicon support substrate;
a silicon oxide film laminated above the silicon support substrate;
a lithium tantalate film laminated above the silicon oxide film;
an IDT electrode having an electrode finger and being provided above the lithium tantalate film;
and
a protection film covering at least a portion of the IDT electrode;
wherein
when a wavelength determined by an electrode finger pitch of the IDT electrode is denoted by ο, a wavelength normalized film thickness of the lithium tantalate film is denoted by TLT, θ of an Euler angle of the lithium tantalate film is denoted by θLT, a wavelength normalized film thickness of the silicon oxide film is denoted by TS, a wavelength normalized film thickness of the IDT electrode in terms of aluminum thickness being a product of a wavelength normalized film thickness of the IDT electrode and a value obtained when density of the IDT electrode is divided by density of aluminum is denoted by TE, a wavelength normalized film thickness of the protection film being a product of a value obtained when density of the protection film is divided by density of silicon oxide and a wavelength normalized film thickness which is a thickness of the protection film normalized by the wavelength λ is denoted by TP, a propagation direction in the silicon support substrate is denoted by ψSi, and a wavelength normalized film thickness which is a thickness of the silicon support substrate normalized by the wavelength λ is denoted by TSi, TLT, θLT, TS, TE, TP, and ψSi are set such that a value represented by Formula (1) below is larger than about −2.4;
I
h
=
(
a
T
L
⁢
T
(
2
)
⁢
(
(
T
L
⁢
T
-
c
T
L
⁢
T
)
2
-
b
T
LT
(
2
)
)
+
a
T
L
⁢
T
(
1
)
⁢
(
T
L
⁢
T
-
c
T
L
⁢
T
)
+
a
T
S
(
2
)
⁢
(
(
T
S
-
c
T
S
)
2
-
b
T
S
(
2
)
)
+
a
T
S
(
1
)
⁢
(
T
S
-
c
T
S
)
+
a
T
B
(
4
)
⁢
(
(
T
E
-
c
T
E
)
4
-
b
T
E
(
4
)
)
+
a
T
E
(
3
)
⁢
(
(
T
E
-
c
T
E
)
3
-
b
T
E
(
3
)
)
+
a
T
E
(
2
)
⁢
(
(
T
E
-
c
T
E
)
2
-
b
T
E
(
2
)
)
+
a
T
E
(
1
)
⁢
(
T
E
-
c
T
E
)
+
a
Ψ
Si
(
6
)
⁢
(
(
Ψ
Si
-
c
Ψ
Si
)
6
-
b
Ψ
Si
(
6
)
)
+
a
Ψ
S
⁢
i
(
5
)
(
(
Ψ
Si
-
c
Ψ
Si
)
5
-
b
Ψ
Si
(
5
)
)
+
a
Ψ
S
⁢
i
(
4
)
⁢
(
(
Ψ
Si
-
c
Ψ
S
⁢
i
)
4
-
b
Ψ
S
⁢
i
(
4
)
)
+
a
Ψ
S
⁢
i
(
3
)
(
(
Ψ
S
⁢
i
-
c
Ψ
Si
)
3
-
b
Ψ
Si
(
3
)
)
+
a
Ψ
Si
(
2
)
⁢
(
(
Ψ
Si
-
c
Ψ
S
⁢
i
)
2
-
b
Ψ
Si
(
2
)
)
+
a
Ψ
Si
(
1
)
⁢
(
Ψ
S
⁢
i
-
c
Ψ
S
⁢
i
)
+
a
θ
L
⁢
T
(
2
)
⁢
(
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
2
-
b
θ
L
⁢
T
(
2
)
)
+
a
θ
L
⁢
T
(
1
)
⁢
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
+
d
T
L
⁢
T
T
⁢
S
⁢
(
T
L
⁢
T
-
c
T
L
⁢
T
)
⁢
(
T
S
-
c
T
S
)
+
d
T
L
⁢
T
T
⁢
E
⁢
(
T
L
⁢
T
-
c
T
L
⁢
T
)
⁢
(
T
E
-
c
T
E
)
+
d
T
L
⁢
T
Ψ
⁢
Si
⁢
(
T
L
⁢
T
-
c
T
L
⁢
T
)
⁢
(
Ψ
S
⁢
i
-
c
Ψ
S
⁢
i
)
+
d
T
L
⁢
T
θ
⁢
L
⁢
T
⁢
(
T
L
⁢
T
-
c
T
L
⁢
T
)
⁢
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
+
d
T
S
T
E
⁢
(
T
S
-
c
T
S
)
⁢
(
T
E
-
c
T
E
)
+
d
T
S
Ψ
⁢
S
⁢
i
⁢
(
T
S
-
c
T
S
)
⁢
(
Ψ
S
⁢
i
-
c
Ψ
S
⁢
i
)
+
d
T
S
θ
⁢
L
⁢
T
⁢
(
T
S
-
c
T
S
)
⁢
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
+
d
T
E
Ψ
⁢
S
⁢
i
⁢
(
T
E
-
c
T
E
)
⁢
(
Ψ
S
⁢
i
-
c
Ψ
S
⁢
i
)
+
d
T
E
θ
⁢
L
⁢
T
⁢
(
T
E
-
c
T
E
)
⁢
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
+
d
Ψ
⁢
S
⁢
i
θ
⁢
L
⁢
T
⁢
(
Ψ
S
⁢
i
-
c
Ψ
Si
)
⁢
(
θ
L
⁢
T
-
c
θ
L
⁢
T
)
+
e
)
⁢
(
a
T
P
⁢
T
P
4
+
b
T
P
⁢
T
P
3
+
c
T
P
⁢
T
P
2
+
d
T
P
⁢
T
p
+
f
T
P
)
;
Formula
⁢
(
1
)
where, coefficients a, b, c, d, e, and fin Formula (1) are values described in Table 25 to Table 36 below that are determined in accordance with a crystal orientation of the silicon support substrate and a range of TS, TLT, and ψSi:
TABLE 25
Si(100)
0 < TLT < 0.2
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
−16.39135605
−16.39135605
bTLT(2)
0
0
cTLT
0.196774194
0.196774194
aTS(2)
0
0
aTS(1)
−4.824831305
−4.824831305
bTS(2)
0
0
cTS
0.170967742
0.170967742
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
−45.57608817
−45.57608817
aTE(1)
−10.80005563
−10.80005563
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0.018296046
0.018296046
cTE
0.303225806
0.303225806
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0.000172048
0.000172048
aψSi(2)
−0.00384923
−0.00384923
aψSi(1)
−0.009826773
−0.009826773
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
143.0843208
143.0843208
bψSi(2)
215.8688866
215.8688866
cψSi
22.25806452
22.25806452
aθLT(2)
0
0
aθLT(1)
0.066799879
0.066799879
bθLT(2)
0
0
cθLT
−50.16129032
−50.16129032
dTLTTS
0
0
dTLTTE
−112.847682
−112.847682
dTLTψSi
0
0
dTLTθLT
0
0
dTSTE
0
0
dTSψSi
−1.750763196
−1.750763196
dTSθLT
0
0
dTEψSi
0
0
dTEθLT
0.466692151
0.466692151
dψSiθLT
0
0
e
−2.904746788
−2.904746788
aTP
0
0
bTP
0
0
cTP
19.811
19.811
dTP
−11.953
−11.953
fTP
1.1978
1.1978;
TABLE 26
Si(100)
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
−8.135537689
−8.135537689
bTLT(2)
0
0
cTLT
0.311659193
0.311659193
aTS(2)
0
0
aTS(1)
−20.38200282
−20.38200282
bTS(2)
0
0
cTS
0.149327354
0.149327354
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
0
0
aTE(1)
−3.460675692
−3.460675692
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0
0
cTE
0.267488789
0.267488789
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0
0
aψSi(2)
−0.003759233
−0.003759233
aψSi(1)
0.015931998
0.015931998
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
0
0
bψSi(2)
239.0395946
239.0395946
cψSi
18.90134529
18.90134529
aθLT(2)
0
0
aθLT(1)
0.017576249
0.017576249
bθLT(2)
0
0
cθLT
−49.9103139
−49.9103139
dTLTTS
−152.1817236
−152.1817236
dTLTTE
0
0
dTLTψSi
−0.359387178
−0.359387178
dTLTθLT
0
0
dTSTE
0
0
dTSψSi
0
0
dTSθLT
0.911415415
0.911415415
dTEψSi
0
0
dTEθLT
0.275815872
0.275815872
dψSiθLT
0
0
e
−3.952626598
−3.952626598
aTP
0
0
bTP
0
0
cTP
19.811
19.811
dTP
−11.953
−11.953
fTP
1.1978
1.1978;
TABLE 27
Si(100)
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
−26.36951471
−26.36951471
bTLT(2)
0
0
cTLT
0.161538462
0.161538462
aTS(2)
0
0
aTS(1)
−10.09828536
−10.09828536
bTS(2)
0
0
cTS
0.321025641
0.321025641
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
−21.38297597
−21.38297597
aTE(1)
−2.383287449
−2.383287449
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0.01947666
0.01947666
cTE
0.270512821
0.270512821
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0.000176024
0.000176024
aψSi(2)
−0.001397911
−0.001397911
aψSi(1)
−0.107515297
−0.107515297
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
−282.3623122
−282.3623122
bψSi(2)
255.2071006
255.2071006
cψSi
23.84615385
23.84615385
aθLT(2)
0
0
aθLT(1)
0.085112984
0.085112984
bθLT(2)
0
0
cθLT
−48.97435897
−48.97435897
dTLTTS
0
0
dTLTTE
0
0
dTLTψSi
−0.816828716
−0.816828716
dTLTθLT
0.865519967
0.865519967
dTSTE
0
0
dTSψSi
−0.538336559
−0.538336559
dTSθLT
0
0
dTEψSi
0
0
dTEθLT
0
0
dψSiθLT
0.002971652
0.002971652
e
−3.504362202
−3.504362202
aTP
0
0
bTP
0
0
cTP
19.811
19.811
dTP
−11.953
−11.953
fTP
1.1978
1.1978;
TABLE 28
Si(100)
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
aTLT(2)
0
0
aTLT(1)
−6.371850196
−6.371850196
bTLT(2)
0
0
cTLT
0.292192192
0.292192192
aTS(2)
0
0
aTS(1)
−0.609606885
−0.609606885
bTS(2)
0
0
cTS
0.2996997
0.2996997
aTE(4)
0
0
aTE(3)
0
0
aTE(2)
0
0
aTE(1)
0
0
bTE(4)
0
0
bTE(3)
0
0
bTE(2)
0
0
cTE
0
0
aψSi(6)
0
0
aψSi(5)
0
0
aψSi(4)
0
0
aψSi(3)
0.000224133
0.000224133
aψSi(2)
−0.004048532
−0.004048532
aψSi(1)
−0.126847922
−0.126847922
bψSi(6)
0
0
bψSi(5)
0
0
bψSi(4)
0
0
bψSi(3)
1375.85979
1375.85979
bψSi(2)
281.2555799
281.2555799
cψSi
19.77477477
19.77477477
aθLT(2)
0
0
aθLT(1)
0.056146223
0.056146223
bθLT(2)
0
0
cθLT
−49.48948949
−49.48948949
dTLTTS
94.47145497
94.47145497
dTLTTE
0
0
dTLTψSi
0
0
dTLTθLT
0
0
dTSTE
0
0
dTSψSi
0
0
dTSθLT
−0.568942451
−0.568942451
dTEψSi
0
0
dTEθLT
0
0
dψSiθLT
0.005654813
0.005654813
e
−4.940340284
−4.940340284
aTP
0
0
bTP
0
0
cTP
19.811
19.811
dTP
−11.953
−11.953
fTP
1.1978
1.1978;
TABLE 29
Si(110)
0 < TLT < 0.2
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−11.04825287
−11.04825287
−11.04825287
−11.04825287
bTLT(2)
0
0
0
0
cTLT
0.164705882
0.164705882
0.164705882
0.164705882
aTS(2)
0
0
0
0
aTS(1)
0
0
0
0
bTS(2)
0
0
0
0
cTS
0
0
0
0
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
−12.86806521
−12.86806521
−12.86806521
−12.86806521
aTE(1)
39.88235294
39.88235294
39.88235294
39.88235294
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0.019258131
0.019258131
0.019258131
0.019258131
cTE
0.286470588
0.286470588
0.286470588
0.286470588
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
−0.000762445
−0.000762445
−0.000762445
−0.000762445
aψSi(1)
−0.031584918
−0.031584918
−0.031584918
−0.031584918
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
749.7716263
749.7716263
749.7716263
749.7716263
cψSi
52.58823529
52.58823529
52.58823529
52.58823529
aθLT(2)
−0.004115091
−0.004115091
−0.004115091
−0.004115091
aθLT(1)
0.023260981
0.023260981
0.023260981
0.023260981
bθLT(2)
81.16262976
81.16262976
81.16262976
81.16262976
cθLT
−50.11764706
−50.11764706
−50.11764706
−50.11764706
dTLTTS
0
0
0
0
dTLTTE
−32.35244505
−32.35244505
−32.35244505
−32.35244505
dTLTψSi
0.348515389
0.348515389
0.348515389
0.348515389
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0
0
0
0
dψSiθLT
0.000823202
0.000823202
0.000823202
0.000823202
e
−1.678155024
−1.678155024
−1.678155024
−1.678155024
aTP
0
0
0
0
bTP
0
0
0
0
cTP
19.811
19.811
19.811
19.811
dTP
−11.953
−11.953
−11.953
−11.953
fTP
1.1978
1.1978
1.1978
1.1978;
TABLE 30
Si(110)
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψsi < 45
45 ≤ ψsi ≤ 90
0 ≤ ψsi < 45
45 ≤ ψsi ≤ 90
aTLT(2)
0
0
34.01092867
34.01092867
aTLT(1)
−3.294448859
−3.294448859
−2.996122319
−2.996122319
bTLT(2)
0
0
0.005572031
0.005572031
cTLT
0.328378378
0.328378378
0.31344086
0.31344086
aTS(2)
0
0
0
0
aTS(1)
2.752851676
2.752851676
−1.564359965
−1.564359965
bTS(2)
0
0
0
0
cTS
0.162837838
0.162837838
0.160752688
0.160752688
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
0
0
aTE(1)
−4.548790211
−4.548790211
−1.370514553
−1.370514553
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0
0
cTE
0.165540541
0.165540541
0.355913978
0.355913978
aψSi(6)
0
0
0
0
aψSi(5)
−7.03888E−08
−7.03888E−08
−3.78178E−08
−3.78178E−08
aψSi(4)
1.4265E−06
1.4265E−06
9.79065E−07
9.79065E−07
aψSi(3)
0.000180358
0.000180358
9.73597E−05
9.73597E−05
aψSi(2)
−0.002681874
−0.002681874
−0.00192926
−0.00192926
aψSi(1)
−0.092266284
−0.092266284
−0.04329175
−0.04329175
bψSi(6)
0
0
0
0
bψSi(5)
11701030.08
11701030.08
24265475.25
24265475.25
bψSi(4)
1439156.296
1439156.296
1705613.393
1705613.393
bψSi(3)
1798.436559
1798.436559
6938.899332
6938.899332
bψSi(2)
930.5183985
930.5183985
1060.880593
1060.880593
cψSi
40.23648649
40.23648649
40.08064516
40.08064516
aθLT(2)
0
0
0
0
aθLT(1)
0.046000242
0.046000242
0.001380272
0.001380272
bθLT(2)
0
0
0
0
cθLT
−49.52702703
−49.52702703
−50.05376344
−50.05376344
dTLTTS
−136.9978702
−136.9978702
−73.06084164
−73.06084164
dTLTTE
0
0
0
0
dTLTψSi
0
0
0.096651605
0.096651605
dTLTθLT
0
0
0
0
dTSTE
0
0
−56.78924979
−56.78924979
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0.081014811
0.081014811
0
0
dTEθLT
0
0
−0.194432704
−0.194432704
dψSiθLT
0
0
0.000875955
0.000875955
e
−2.543790382
−2.543790382
−2.964933907
−2.964933907
aTP
0
0
0
0
bTP
0
0
0
0
cTP
19.811
19.811
19.811
19.811
dTP
−11.953
−11.953
−11.953
−11.953
fTP
1.1978
1.1978
1.1978
1.1978;
TABLE 31
Si(110)
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−13.1565646
−13.1565646
−13.1565646
−13.1565646
bTLT(2)
0
0
0
0
cTLT
0.179661017
0.179661017
0.179661017
0.179661017
aTS(2)
−54.97015257
−54.97015257
−54.97015257
−54.97015257
aTS(1)
1.195559996
1.195559996
1.195559996
1.195559996
bTS(2)
0.006496856
0.006496856
0.006496856
0.006496856
cTS
0.299435028
0.299435028
0.299435028
0.299435028
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
−12.83875925
−12.83875925
−12.83875925
−12.83875925
aTE(1)
−2.591177902
−2.591177902
−2.591177902
−2.591177902
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0.02062115
0.02062115
0.02062115
0.02062115
cTE
0.282768362
0.282768362
0.282768362
0.282768362
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
−0.00094978
−0.00094978
−0.00094978
−0.00094978
aψSi(1)
−0.016861509
−0.016861509
−0.016861509
−0.016861509
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
−0.00094978
−0.00094978
−0.00094978
−0.00094978
cψSi
44.83050847
44.83050847
44.83050847
44.83050847
aθLT(2)
0
0
0
0
aθLT(1)
0.020120147
0.020120147
0.020120147
0.020120147
bθLT(2)
0
0
0
0
cθLT
−50.50847458
−50.50847458
−50.50847458
−50.50847458
dTLTTS
0
0
0
0
dTLTTE
0
0
0
0
dTLTψSi
0.250474306
0.250474306
0.250474306
0.250474306
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0.031071552
0.031071552
0.031071552
0.031071552
dTEθLT
0
0
0
0
dψSiθLT
0
0
0
0
e
−1.687640015
−1.687640015
−1.687640015
−1.687640015
aTP
0
0
0
0
bTP
0
0
0
0
cTP
19.811
19.811
19.811
19.811
dTP
−11.953
−11.953
−11.953
−11.953
fTP
1.1978
1.1978
1.1978
1.1978;
TABLE 32
Si(110)
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 45
45 ψSi ≤ 90
0 ≤ ψSi < 45
45 ≤ ψSi ≤ 90
aTLT(2)
0
0
0
0
aTLT(1)
−8.387315737
−8.387315737
−11.34973266
−6.017883428
bTLT(2)
0
0
0
0
cTLT
0.313377926
0.313377926
0.291082803
0.294578313
aTS(2)
0
0
0
0
aTS(1)
0.140898252
0.140898252
3.107378473
2.287606243
bTS(2)
0
0
0
0
cTS
0.299331104
0.299331104
0.277707006
0.296385542
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
0
0
0
0
aTE(1)
−1.209727849
−1.209727849
−4.259242642
−1.280235687
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0
0
0
0
cTE
0.152006689
0.152006689
0.343630573
0.351204819
aψSi(6)
0
0
0
0
aψSi(5)
−2.33027E−08
−2.33027E−08
0
0
aψSi(4)
7.78115E−07
7.78115E−07
0
0
aψSi(3)
5.59108E−05
5.59108E−05
−0.000194818
0
aψSi(2)
−0.002410767
−0.002410767
0.000247924
0
aψSi(1)
−0.027662563
−0.027662563
0.12904143
−0.026766472
bψSi(6)
0
0
0
0
bψSi(5)
2083705.649
2083705.649
0
0
bψSi(4)
1386257.115
1386257.115
0
0
bψSi(3)
−1267.41343
−1267.41343
1811.750092
0
bψSi(2)
895.5856198
895.5856198
293.105197
0
cψSi
42.14046823
42.14046823
19.39490446
67.95180723
aθLT(2)
0
0
0
0
aθLT(1)
0.020067585
0.020067585
−0.011988832
0.032566601
bθLT(2)
0
0
0
0
cθLT
−49.73244147
−49.73244147
−49.61783439
−50.96385542
dTLTTS
0
0
0
0
dTLTTE
0
0
0
41.29194486
dTLTψSi
0
0
−0.203585177
0.376861254
dTLTθLT
0
0
−0.273779971
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
−0.20937463
dTSθLT
−0.349110894
−0.349110894
0
0
dTEψSi
0
0
0
0
dTEθLT
−0.216865482
−0.216865482
0
0
dψSiθLT
0
0
0.00120304
0
e
−2.390757235
−2.390757235
−2.548464154
−2.523994879
aTP
0
0
0
0
bTP
0
0
0
0
cTP
19.811
19.811
19.811
19.811
dTP
−11.953
−11.953
−11.953
−11.953
fTP
1.1978
1.1978
1.1978
1.1978;
TABLE 33
Si(111)
0 < TLT < 0.2
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
−3.047618237
−3.047618237
−3.047618237
−3.047618237
bTLT(2)
0
0
0
0
cTLT
0.160869565
0.160869565
0.160869565
0.160869565
aTS(2)
0
0
0
0
aTS(1)
0
0
0
0
bTS(2)
0
0
0
0
cTS
0
0
0
0
aTE(4)
0
0
0
0
aTE(3)
11.21750437
11.21750437
11.21750437
11.21750437
aTE(2)
−3.666215654
−3.666215654
−3.666215654
−3.666215654
aTE(1)
−0.035248162
−0.035248162
−0.035248162
−0.035248162
bTE(4)
0
0
0
0
bTE(3)
0.000381688
0.000381688
0.000381688
0.000381688
bTE(2)
0.012589792
0.012589792
0.012589792
0.012589792
cTE
0.245652174
0.245652174
0.245652174
0.245652174
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
0
0
aψSi(1)
−0.003582211
−0.003582211
−0.003582211
−0.003582211
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
0
0
cψSi
35.86956522
35.86956522
35.86956522
35.86956522
aθLT(2)
−0.000596775
−0.000596775
−0.000596775
−0.000596775
aθLT(1)
0.003385783
0.003385783
0.003385783
0.003385783
bθLT(2)
77.88279773
77.88279773
77.88279773
77.88279773
cθLT
−47.82608696
−47.82608696
−47.82608696
−47.82608696
dTLTTS
0
0
0
0
dTLTTE
−2.939323227
−2.939323227
−2.939323227
−2.939323227
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0
0
0
0
dψSiθLT
−0.000442922
−0.000442922
−0.000442922
−0.000442922
e
−0.277577227
−0.277577227
−0.277577227
−0.277577227
aTP
0
0
0
0
bTP
0
0
0
0
cTP
19.811
19.811
19.811
19.811
dTP
−11.953
−11.953
−11.953
−11.953
fTP
1.1978
1.1978
1.1978
1.1978;
TABLE 34
Si(111)
0.2 ≤ TLT ≤ 3.5
0 ≤ TS < 0.2
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
0
0
0
0
bTLT(2)
0
0
0
0
cTLT
0
0
0
0
aTS(2)
0
0
0
0
aTS(1)
6.03484153
6.03484153
6.03484153
6.03484153
bTS(2)
0
0
0
0
cTS
0.183333333
0.183333333
0.183333333
0.183333333
aTE(4)
−215.3850281
−215.3850281
−215.3850281
−215.3850281
aTE(3)
54.12265846
54.12265846
54.12265846
54.12265846
aTE(2)
0.942905209
0.942905209
0.942905209
0.942905209
aTE(1)
−1.08045121
−1.08045121
−1.08045121
−1.08045121
bTE(4)
0.000339332
0.000339332
0.000339332
0.000339332
bTE(3)
0.000317558
0.000317558
0.000317558
0.000317558
bTE(2)
0.011265432
0.011265432
0.011265432
0.011265432
cTE
0.211111111
0.211111111
0.211111111
0.211111111
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
0
0
aψSi(1)
−0.004526908
−0.004526908
−0.004526908
−0.004526908
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
0
0
cψSi
27.5
27.5
27.5
27.5
aθLT(2)
−0.00046365
−0.00046365
−0.00046365
−0.00046365
aθLT(1)
0.005349146
0.005349146
0.005349146
0.005349146
bθLT(2)
57.09876543
57.09876543
57.09876543
57.09876543
cθLT
−46.11111111
−46.11111111
−46.11111111
−46.11111111
dTLTTS
0
0
0
0
dTLTTE
0
0
0
0
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
45.80413521
45.80413521
45.80413521
45.80413521
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
−0.071786246
−0.071786246
−0.071786246
−0.071786246
dψSiθLT
−0.000425881
−0.000425881
−0.000425881
−0.000425881
e
−0.446604617
−0.446604617
−0.446604617
−0.446604617
aTP
0
0
0
0
bTP
0
0
0
0
cTP
19.811
19.811
19.811
19.811
dTP
−11.953
−11.953
−11.953
−11.953
fTP
1.1978
1.1978
1.1978
1.1978;
TABLE 35
Si(111)
0 < TLT < 0.2
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
−2.477108842
−2.477108842
−2.477108842
−2.477108842
bTLT(2)
0
0
0
0
cTLT
0.137349398
0.137349398
0.137349398
0.137349398
aTS(2)
0
0
0
0
aTS(1)
−0.488747927
−0.488747927
−0.488747927
−0.488747927
bTS(2)
0
0
0
0
cTS
0.336144578
0.336144578
0.336144578
0.336144578
aTE(4)
0
0
0
0
aTE(3)
0
0
0
0
aTE(2)
−1.973253274
−1.973253274
−1.973253274
−1.973253274
aTE(1)
−0.124870592
−0.124870592
−0.124870592
−0.124870592
bTE(4)
0
0
0
0
bTE(3)
0
0
0
0
bTE(2)
0.017915517
0.017915517
0.017915517
0.017915517
cTE
0.256024096
0.256024096
0.256024096
0.256024096
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
7.6083E−07
7.6083E−07
7.6083E−07
7.6083E−07
aψSi(3)
7.21121E−06
7.21121E−06
7.21121E−06
7.21121E−06
aψSi(2)
−0.000857107
−0.000857107
−0.000857107
−0.000857107
aψSi(1)
−0.00490823
−0.00490823
−0.00490823
−0.00490823
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
105622.9088
105622.9088
105622.9088
105622.9088
bψSi(3)
−217.2019476
−217.2019476
−217.2019476
−217.2019476
bψSi(2)
208.4409929
208.4409929
208.4409929
208.4409929
cψSi
30.54216867
30.54216867
30.54216867
30.54216867
aθLT(2)
0
0
0
0
aθLT(1)
0
0
0
0
bθLT(2)
0
0
0
0
cθLT
−90
−90
−90
−90
dTLTTS
4.821777856
4.821777856
4.821777856
4.821777856
dTLTTE
−4.14067246
−4.14067246
−4.14067246
−4.14067246
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
0
0
0
0
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0.024454063
0.024454063
0.024454063
0.024454063
dTEθLT
0
0
0
0
dψSiθLT
0
0
0
0
e
−0.240178915
−0.240178915
−0.240178915
−0.240178915
aTP
0
0
0
0
bTP
0
0
0
0
cTP
19.811
19.811
19.811
19.811
dTP
−11.953
−11.953
−11.953
−11.953
fTP
1.1978
1.1978
1.1978
1.1978;
and
TABLE 36
Si(111)
0.2 ≤ TLT ≤ 3.5
0.2 ≤ TS ≤ 2.0
0.05 ≤ TE < 0.25
0.25 ≤ TE ≤ 0.45
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
0 ≤ ψSi < 30
30 ≤ ψSi ≤ 60
aTLT(2)
0
0
0
0
aTLT(1)
0
0
0
0
bTLT(2)
0
0
0
0
cTLT
0
0
0
0
aTS(2)
0
0
0
0
aTS(1)
0.380779889
0.380779889
0.380779889
0.380779889
bTS(2)
0
0
0
0
cTS
0.285294118
0.285294118
0.285294118
0.285294118
aTE(4)
−165.3225345
−165.3225345
−165.3225345
−165.3225345
aTE(3)
23.65923214
23.65923214
23.65923214
23.65923214
aTE(2)
2.256295059
2.256295059
2.256295059
2.256295059
aTE(1)
−0.292409126
−0.292409126
−0.292409126
−0.292409126
bTE(4)
0.00051583
0.00051583
0.00051583
0.00051583
bTE(3)
0.00070344
0.00070344
0.00070344
0.00070344
bTE(2)
0.015017301
0.015017301
0.015017301
0.015017301
cTE
0.220588235
0.220588235
0.220588235
0.220588235
aψSi(6)
0
0
0
0
aψSi(5)
0
0
0
0
aψSi(4)
0
0
0
0
aψSi(3)
0
0
0
0
aψSi(2)
0
0
0
0
aψSi(1)
−0.004846255
−0.004846255
−0.004846255
−0.004846255
bψSi(6)
0
0
0
0
bψSi(5)
0
0
0
0
bψSi(4)
0
0
0
0
bψSi(3)
0
0
0
0
bψSi(2)
0
0
0
0
cψSi
29.55882353
29.55882353
29.55882353
29.55882353
aθLT(2)
0
0
0
0
aθLT(1)
0.00165846
0.00165846
0.00165846
0.00165846
bθLT(2)
0
0
0
0
cθLT
−48.52941176
−48.52941176
−48.52941176
−48.52941176
dTLTTS
−0.04933649
−0.04933649
−0.04933649
−0.04933649
dTLTTE
−0.021023839
−0.021023839
−0.021023839
−0.021023839
dTLTψSi
0
0
0
0
dTLTθLT
0
0
0
0
dTSTE
−7.074776252
−7.074776252
−7.074776252
−7.074776252
dTSψSi
0
0
0
0
dTSθLT
0
0
0
0
dTEψSi
0
0
0
0
dTEθLT
0
0
0
0
dψSiθLT
−0.00049898
−0.00049898
−0.00049898
−0.00049898
e
−0.3405485
−0.3405485
−0.3405485
−0.3405485
aTP
0
0
0
0
bTP
0
0
0
0
cTP
19.811
19.811
19.811
19.811
dTP
−11.953
−11.953
−11.953
−11.953
fTP
1.1978
1.1978
1.1978
1.1978.

3,382 more elements

Acoustic wave device, acoustic wave filter, and composite filter device

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Acoustic wave device, acoustic wave filter, and composite filter device

Life of this patent

Abstract

Claims20