Bottom-emitting emitter array with a bottom side metal layer
AssigneeLumentum Operations LLC
InventorsAjit Vijay Barve, Eric R. Hegblom
Life of this patent
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Abstract
In some implementations, an emitter array may include a substrate, an epitaxial structure on the substrate, a plurality of bottom-emitting emitters defined in the epitaxial structure, a first electrical contact positioned at a top side of the epitaxial structure, a second electrical contact positioned at the top side of the epitaxial structure, and a metal layer disposed on a bottom side of the substrate. The metal layer may be electrically connected to the second electrical contact. The metal layer may include one or more openings for light emission of the plurality of bottom-emitting emitters.
Claims20
An emitter array, comprising:
- a substrate;
- an epitaxial structure on the substrate;
- a plurality of bottom-emitting emitters defined in the epitaxial structure;
- a first electrical contact positioned at a top side of the epitaxial structure;
- a second electrical contact positioned at the top side of the epitaxial structure;
- and
- a metal layer disposed on a bottom side of the substrate,
- wherein the metal layer is electrically connected to the second electrical contact,
- wherein the metal layer is configured to have a current path for a current, from the first electrical contact, to flow laterally across the metal layer and into the second electrical contact, and
- wherein the metal layer includes one or more openings for light emission of the plurality of bottom-emitting emitters.
A vertical-cavity surface-emitting laser (VCSEL) array, comprising:
- a substrate;
- an epitaxial structure on the substrate;
- a plurality of bottom-emitting VCSELs defined in the epitaxial structure;
- a first electrical contact positioned at a top side of the epitaxial structure;
- a second electrical contact positioned at the top side of the epitaxial structure;
- and
- a metal layer disposed on a bottom side of the substrate,
- wherein the metal layer is electrically connected to the second electrical contact,
- wherein the metal layer is configured to have a current path for a current, from the first electrical contact, to flow laterally across the metal layer and into the second electrical contact, and
- wherein the metal layer includes one or more openings.
An optical source, comprising:
- an emitter array that comprises:
- a substrate;
- an epitaxial structure on the substrate, the epitaxial structure including a top mirror and a bottom mirror;
- a plurality of bottom-emitting emitters defined in the epitaxial structure;
- a first electrical contact positioned at a top side of the epitaxial structure;
- a second electrical contact positioned at the top side of the epitaxial structure,
- wherein the second electrical contact is laterally distanced from the plurality of bottom-emitting emitters;
- and
- a metal layer disposed on a bottom side of the substrate,
- wherein the metal layer is electrically connected to the substrate, the bottom mirror, and the second electrical contact,
- wherein the metal layer is configured to have a current path for a current, from the first electrical contact, to flow laterally across the metal layer and into the second electrical contact, and
- wherein the metal layer includes one or more openings for light emission of the plurality of bottom-emitting emitters.
Dependencies are inferred from the claim text.