Lithium anode device stack manufacturing
AssigneeApplied Materials, Inc.
InventorSubramanya P. Herle
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Abstract
Metal electrodes, more specifically lithium-containing anodes, high performance electrochemical devices, such as secondary batteries, including the aforementioned lithium-containing electrodes, and methods for fabricating the same are provided. In one or more embodiments, an anode electrode structure is provided and includes a current collector comprising copper, a lithium metal film formed on the current collector, a copper film formed on the lithium metal film, and a protective film formed on the copper film. The protective film is a lithium-ion conducting film can include lithium-ion conducting ceramic, a lithium-ion conducting glass, or ion conducting liquid crystal.
Claims20
An anode electrode structure, comprising:
- a current collector comprising copper;
- a lithium metal film formed on the current collector;
- a metal film formed on the lithium metal film and in direct contact with the current collector;
- and
- a protective film formed on the metal film,
- wherein the protective film is a lithium-ion conducting film comprising lithium-ion conducting ceramic, lithium-ion conducting glass, lithium-ion conducting polymer, lithium- ion conducting liquid crystal, or combinations thereof, and
- wherein the metal film is selected from a copper film, a bismuth film, or combinations thereof.
An anode electrode structure, comprising:
- a current collector comprising copper;
- a lithium metal film formed on the current collector;
- a copper film formed on the lithium metal film and in direct contact with the current collector;
- and
- a protective film formed on the copper film,
- wherein the protective film is a lithium-ion conducting film comprising lithium-ion conducting ceramic, lithium-ion conducting glass, lithium-ion conducting polymer, lithium- ion conducting liquid crystal, or combinations thereof.
An anode electrode structure, comprising:
- a current collector comprising copper;
- a lithium metal film formed on the current collector;
- a copper film formed on the lithium metal film, in direct contact with the current collector, and having a thickness in a range from about 5 nanometers to about 40 nanometers;
- and
- a protective film formed on the copper film;
- wherein the protective film is a lithium-ion conducting film comprising lithium-ion conducting ceramic, lithium-ion conducting glass, lithium-ion conducting polymer, lithium- ion conducting liquid crystal, or combinations thereof;
- and
- wherein the lithium-ion conducting film comprises one or more of aluminum oxide, LiPON, Li7La3Zr2O12 (LLZO), Li2S-P2S5, Li10GeP2S12, Li3PS4, (1-x)LiI-(x)Li4SnS4, (x)LiI- (1-x)Li4SnS4, (1-x)LiI-(x)Li4SnS4, (x)LiI-(1-x)Li4SnS4), wherein 0<x<1.
Dependencies are inferred from the claim text.