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US 11,888,084 B2Granted
Optimization of high resolution digitally encoded laser scanners for fine feature marking
AssigneenLIGHT, Inc.
InventorKen Gross
Life of this patent
Estimating the term…
Abstract
Disclosed herein are laser scanning systems and methods of their use. In some embodiments, laser scanning systems can be used to ablatively or non-ablatively scan a surface of a material. Some embodiments include methods of scanning a multi-layer structure. Some embodiments include translating a focus-adjust optical system so as to vary laser beam diameter. Some embodiments make use of a 20-bit laser scanning system.
Claims19
A method, comprising:
- defining a scan pattern based on a plurality of scan vectors;
- and
- with the scan pattern and a scan controller, controlling an optical system to direct a processing beam to a scan area on a substrate with a predetermined beam diameter to produce exposed scan vectors such that transverse offsets between the exposed scan vectors and intended scan vectors are less than 1/10 of the predetermined beam diameter based on beam deflection angles defined by a number of bits used to determine beam deflections and a focal plane distance.
An apparatus, comprising:
- an optical source configured to produce a processing beam having a predetermined beam diameter;
- an optical system situated to receive the processing beam from the optical source;
- a substrate stage adapted to retain a substrate;
- and
- a scan controller configured to receive a scan pattern defined as a plurality of scan vectors and control at least one of the optical system and the substrate stage so that the processing beam is directed to a scan area of the substrate with a predetermined beam diameter to produce exposed scan vectors in the scan area such that transverse offsets between the exposed scan vectors and intended scan vectors are less than 1/10 of the predetermined beam diameter based on beam deflection angles defined by a number of bits used to determine beam deflections and a focal plane distance.
2 more elements
Dependencies are inferred from the claim text.