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US 11,888,075 B2Granted
Plasmonic field-enhanced photodetector and image sensor using light absorbing layer having split conduction band and valence band
OwnerHoon Kiminventor
Life of this patent
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Abstract
A plasmonic field-enhanced photodetector is disclosed. The photodetector absorbs surface plasmon polaritons (SPPs) by using a light absorbing layer having a conduction band and a valence band in which an energy is split, the SPPs being generated by combining surface plasmons (SPs) with photons of a light wave, and generates photocurrent based on the absorbed SPPs.
Claims13
A photodetector comprising:
- a metal layer shielding incident light and generating surface plasmon polaritons (SPPs);
- a light absorbing layer using the generated SPPs and allowing charges excited by the SPPs and a localized electric field effect to tunnel;
- and
- a dielectric formed at nanoholes in which at least a part of the metal layer is opened,
- wherein the SPPs form localized surface plasmons (LSPs) at an interface where the metal layer meets the dielectric,
- wherein a density of a localized electric field increases per unit area to increase photocurrent as a size of the nanoholes decreases, and
- wherein the photocurrent is induced by a localized electric field effect of the absorbed SPPs and tunneling of charges excited by photons of light.
4 more elements
An image sensor comprising:
- a metal surface;
- a metal nanohole array formed on the metal surface;
- and
- a detector array formed at a position corresponding to the metal nanohole array,
- wherein the metal surface is configured to shield incident light and generate surface plasmon polaritons (SPPs),
- wherein the detector array comprises:
- a light absorbing layer using the generated SPPs and allowing charges excited by the SPPs and a localized electric field effect to tunnel;
- and
- a dielectric formed at nanoholes in which at least a part of the metal layer is opened, and
- wherein the SPPs form localized surface plasmons (LSPs) at an interface where the metal layer meets the dielectric,
- wherein a density of a localized electric field increases per unit area to increase photocurrent as a size of the nanoholes decreases, and
- wherein the metal surface is extended from a surface to the light absorbing layer and guides the generated SPPs to be transmitted to the light absorbing layer.
9 more elements
Dependencies are inferred from the claim text.