Manufacturing apparatus and manufacturing method using the same

A manufacturing method comprising:

• disposing a target substrate on a stage inside a chamber;
• moving the stage;
• and
• irradiating a laser beam onto a surface of the target substrate,
• wherein the stage includes:
• an upper surface on which the target substrate is mounted;
• a lower surface opposite to the upper surface;
• a first side surface extending between the upper surface and the lower surface in a first direction;
• and
• a second side surface extending between the upper surface and the lower surface in a second direction perpendicular to the first direction, wherein
• the first side surface is in a round shape, and at least a portion of the first side surface is convex toward an outside of the stage, the round shape of the first side surface causing a downward airflow along the upper surface through the first side surface to below the stage using the Coanda effect.